Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7356, Issue , 2009, Pages

  Rahneberg, I ^a   Buchner H J ^a   Jager G ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Geometric error; Laser; PSD; Roll; Straightness

Indexed keywords

DETECTOR HEADS; GEOMETRIC ERROR; GEOMETRIC ERRORS; INTENSITY PROFILES; LATERAL DISPLACEMENTS; LINEAR MEASUREMENTS; LINEAR STAGES; MEASUREMENT PRINCIPLE; MEASUREMENT SYSTEM; PLANE MIRRORS; POSITION SENSITIVITY; POSITION-SENSITIVE DETECTORS; PSD; REFLECTOR GEOMETRY; ROLL; ROLL ANGLE; SIMULTANEOUS MEASUREMENT; SIX-DEGREE-OF-FREEDOM; STRAIGHTNESS; STRAIGHTNESS ERRORS; STRAIGHTNESS MEASUREMENT; TRIPLE PRISM;

DETECTORS; ERRORS; INTERFEROMETERS; INTERFEROMETRY; LASER BEAMS; LASERS; MIRRORS; OPTICAL SENSORS; OPTICAL SYSTEMS; POWER SPECTRAL DENSITY; PULSE SHAPING CIRCUITS; REFLECTION;

SYSTEMATIC ERRORS;

EID: 70350060440     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820634     Document Type: Conference Paper

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