Analysis of the air damping in MEMS lateral driven microresonators

Proceedings of International Symposium on High Density Packaging and Microsystem Integration 2007, HDP'07

Volumn , Issue , 2007, Pages

  Xie, Mingchun ^a   Wang, Xiaojing ^a   Yu, Maohua ^a   Zhang, Minliang ^a   Wang, Guoliang ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

Air damping; ANSYS; MEMS; Microresonator

Indexed keywords

FINITE ELEMENT METHOD; NUMERICAL METHODS; RESONATORS; REYNOLDS EQUATION;

AIR DAMPING; MICRORESONATORS;

MEMS;

EID: 41049091209     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HDP.2007.4283654     Document Type: Conference Paper

References (8)

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8. W. C.-K. Tang, "Electrostatic comb drive for resonant sensor and actuator applications", Ph.D. Thesis, Dept. EECS, Univ. of California, Berkeley, 1990.