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Volumn 95, Issue 12, 2009, Pages

Selective liquid crystal molecule orientation on ion beam irradiated tantalum oxide ultrathin films

(9) Lim, Ji Hun a Oh, Byeong Yun a Lee, Won Kyu a Lee, Kang Min a Na, Hyun Jae a Kim, Byoung Yong a Seo, Dae Shik a Han, Jeong Min b Hwang, Jeong Yeon c

a Yonsei University (South Korea)

b Seoil University (South Korea)

c KENT STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSE PLASMA; HIGH-K DIELECTRIC CONSTANT; ION BEAM DEVICES; IRRADIATION TIME; LIQUID CRYSTAL MOLECULES; LOW-POWER CONSUMPTION; PEAK SHIFT; RF-MAGNETRON SPUTTERING; TANTALUM OXIDES;

CRYSTAL ORIENTATION; ION BEAMS; LIQUID CRYSTALS; MAGNETRON SPUTTERING; OXIDE FILMS; TANTALUM; TANTALUM COMPOUNDS; ULTRATHIN FILMS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70349659528 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3232239 Document Type: Article

Times cited : (22)

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