Integrated inductors for RF transmitters in CMOS/MEMS smart microsensor systems

Sensors

Volumn 7, Issue 8, 2007, Pages 1387-1398

  Kim, Jong Wan ^a,b   Takao, Hidekuni ^a,b   Sawada, Kazuaki ^a,b   Ishida, Makoto ^a,b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Bonding wire inductor; CMOS compatible process; CMOS MEMS; RF transmitter

Indexed keywords

ANTENNAS; CMOS INTEGRATED CIRCUITS; DIELECTRIC DEVICES; FABRICATION; METALLIC COMPOUNDS; METALS; MICROSENSORS; MOS DEVICES; OXIDE SEMICONDUCTORS; RADIO TRANSMISSION; TRANSISTORS; TRANSMITTERS; VARIABLE FREQUENCY OSCILLATORS; WIRE;

BONDING WIRES; CMOS COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; ELECTROMECHANICAL SYSTEMS; INTEGRATED INDUCTORS; INTEGRATED TECHNIQUES; RADIO FREQUENCY TRANSMITTERS; RF TRANSMITTER;

ELECTRIC INDUCTORS;

EID: 34548381639     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7081387     Document Type: Article

References (15)

1. The Life Shirt System; Vivometrics Corporation: Ventura, CA, USA; [http://www.vivometrics.com/site/research.html].
2. SenseWear Body Monitoring System; BodyMedia Corporation: Pittsburgh, PA, USA; [http://www.bodymedia.com/products/index.jsp].
3. Kim, J.W.; Ichikawa, T.; Takao, H.; Sawada, K.; Ishida, M. Smart micro sensors with RF transmitter for intelligent human sensing system. Proc. IEEE Sensors Appl. Symp.(SAS): Houston, TX, USA, 2006, 2, 78-81.
4. Sung, M.; Marci, C.; Pentland A., Wearable feedback systems for rehabilitation. Journal of Neuro Engineering and Rehabilitation 2005, 6, 2:17.
5. Warneke, B.; Pister, K.S.J. MEMS for distributed wireless sensor networks. In 9th Int'l Conf. Electron., Circ. Syst. Dubrovnik, Croatia, 2002, 9, 15-18.
6. Takao, H.; Fukumoto, H.; Ishida, M. A CMOS integrated three-axis accelerometer fabricated with commercial sub-micron CMOS technology and bulk-micromachining. IEEE Trans. Electron Dev. 2001, 9, 48, 1961-1968.
7. Kawano, T.; Ishihara, A.; Harimoto, T.; Takao, H.; Sawada, K.; Usui, S.; Ishida, M. Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system. Proc. 2004 Int. Electron Dev. Meet. (IEEE IEDM 2004): San Francisco, CA, 2004, 12, 1013-1016.
8. Kim, J.-W.; Takao, H.; Sawada, K.; Ishida, M. Development of radio frequency transmitters including on-chip antenna for intelligent human sensing systems. IEEJ Trans. Elect. Electron. Eng. 2007, 2, 365-371.
9. Moore, G.E. Cramming more components onto integrated circuits. Electronics 1965, 38 10131016.
10. Christensen, K.; Jorgensen, R., Easy Simulation and Design of On-Chip Inductors in Standard CMOS Processes. Proc. IEEE Int. Symp. Circ. Syst. 1998, 5, 360-364.
11. Aguilera, J., Berenguer R. Design and Test of Integrated Inductors for RF Applications. Kluwer Academic Publishers: Dordrecht, The Netherlands, 2003.
12. Razavi, B. RF Microelectronics. Prentice Hall PTR; USA, 1998.
13. Sendra, R.; Pino, J.; Hernández A.; González B.; García J.; García-Alonso A.; Nuñez A. Integrated Inductors Modeling for Library Development and Layout Generation. An International Journal of Analog Integrated Circuits and Signal Processing 2003, 35, 121-132.
14. Craninckx, J. A 1.8 GHz low phase noise CMOS VCO using optimized hollow spiral inductors. IEEE J Solid-State Circ. 1997, 32, 736-774.
15. Razavi, B. Design of Analog CMOS Integrated Circuits. McGraw-Hill: Singapore, 2001.