Direct conversion of a metal organic compound to epitaxial Sb-doped SnO 2 film on a (0 0 1) TiO 2 substrate using a KrF laser, and its resulting electrical properties

Applied Surface Science

Volumn 255, Issue 24, 2009, Pages 9808-9812

  Tsuchiya, Tetsuo ^a   Kato, F ^b   Nakajima, T ^a   Igarashi, K ^b   Kumagai, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b CHIBA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Epitaxial; Excimer laser; Sb doped SnO 2

Indexed keywords

AMORPHOUS FILMS; ANTIMONY COMPOUNDS; CARRIER CONCENTRATION; DEPOSITION; EXCIMER LASERS; FILM PREPARATION; HALL MOBILITY; IRRADIATION; METALS; ORGANIC LASERS; ORGANOMETALLICS; THIN FILMS; TITANIUM DIOXIDE;

AMORPHOUS PRECURSORS; DIRECT CONVERSION; DIRECT IRRADIATION; EPITAXIAL; METAL ORGANIC COMPOUND; METAL ORGANIC DEPOSITION; METAL ORGANIC PRECURSORS; SB-DOPED SNO2;

FLUORINE COMPOUNDS;

EID: 70349443286     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.095     Document Type: Article

References (6)

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