Preparation of ZnO:Ga thin films by helicon-wave-excited plasma sputtering

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 9, 2008, Pages 3135-3137

  Masaki, Shingo ^a   Nakanishi, Hisayuki ^a   Sugiyama, Mutsumi ^a   Chichibu, Shigefusa F ^b  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GA FILM; GALLIUM DOPED ZINC OXIDES; OPTICAL TRANSMITTANCE; ORIENTED GROWTH; PLASMA SPUTTERING; TRANSPARENT CONDUCTING OXIDE FILMS; WAVELENGTH RANGES; ZNO;

CONDUCTIVE FILMS; HELICONS; OXIDE FILMS; SEMICONDUCTOR GROWTH; ZINC; ZINC OXIDE;

FILM PREPARATION;

EID: 70349419680     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200779182     Document Type: Conference Paper

References (13)

1. I. Hamberg and C. G. Granqvist, J. Appl. Phys. 60, R123 (1986).
2. T. Minami, K. Oohashi, and S. Takata, Thin Solid Films 193/194, 721 (1990).
3. T. Minami, H. Nanto, and S. Takata, Jpn. J. Appl. Phys. 23, L280 (1984).
4. A. Suzuki, T. Matsushita, Y. Sakamoto, N. Wada, T. Fukuda, H. Fujiwara, and M. Okuda, Jpn. J. Appl. Phys. 35, 5457 (1996).
5. K. Ogata, T. Kawanishi, K. Maejima, K. Sakurai, Sz. Fujita, and Sg. Fujita, Jpn. J. Appl. Phys. 40, L657 (2001).
6. Y. H. Lee, M. H. Song, and B. K. Ju, J. Vac. Sci. Technol. B 15, 512 (1997).
7. K. Yamaya, Y. Yamaki, H. Nakanishi, and S. Chichibu, Appl. Phys. Lett. 72, 235 (1998).
8. F. Chen, J. Vac. Sci. Technol. A 10, 1389 (1992).
9. R. Boswell, Proceedings of 21st International Conference on Phenomena in Ionised Gases, edited by G. Ecker, U. Arendt, J. Boseler, and A. Brunn (Arbeitsgemeinschaft Plasma Physik, Bochum, 1993), p. 18.
10. S. F. Chichibu, T. Yoshida, T. Onuma, and H. Nakanishi, J. Appl. Phys. 91, 874 (2002).
11. T. Koyama, T. Onuma, and S. F. Chichibu, Appl. Phys. Lett. 83, 2973 (2003).
12. H. J. Ko, Y. F. Chen, S. K. Hong, H. Wenisch, and T. Yao, Appl. Phys. Lett. 77, 3761 (2000).
13. T. Watari, Phys. Fluids 21, 2076 (1978).