Fabrication of plasma-induced polymer nanograss for a synthetic moth-eye antireflection nanostructure

Journal of the Korean Physical Society

Volumn 55, Issue 2, 2009, Pages 566-571

  Lee, Ki Joong ^a   Jeong, Jun Ho ^a   Kim, Ki Don ^a   Lee, Jihye ^a   Choi, Dae Geun ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Anti reflective film; Nanoimprint; Plasma induced nanostructure; Reactive ion etch (RIE)

Indexed keywords

EID: 70349331153     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.55.566     Document Type: Article

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