Pulsed laser deposited Y-doped BaZrO3 thin films for high temperature humidity sensors

Sensors and Actuators, B: Chemical

Volumn 142, Issue 1, 2009, Pages 166-174

  Chen, XiaoXin ^a   Rieth, Loren ^a   Miller, Mark S ^a   Solzbacher, Florian ^a,b  

^a University of Utah   (United States)

^b UNIVERSITY OF UTAH   (United States)

Author keywords

High temperature; Humidity; Ionic conductor; Microsensor; Physical vapor deposition (PVD); Thin film; Y doped BaZrO3 material

Indexed keywords

AFM; ANNEALING TEMPERATURES; COMBUSTION PRO-CESS; DEFECT CHEMISTRY; DEPOSITION METHODS; ELECTRICAL PROPERTY; EMISSIONS CONTROL; FILM CONDUCTIVITY; HIGH OPERATING TEMPERATURE; HIGH TEMPERATURE; HUMID ATMOSPHERES; HUMIDITY; HUMIDITY MEASUREMENTS; IN-SITU; IONIC CONDUCTOR; LONG TERM STABILITY; LOW COSTS; MICRO-FABRICATION TECHNOLOGY; POLYCRYSTALLINE; PROTON CONDUCTION; PULSED LASER; ROOT MEAN SQUARE ROUGHNESS; SAMPLE SURFACE; SENSING MECHANISM; SUBSTRATE TEMPERATURE; THIN-FILM DEPOSITIONS; Y-DOPED; Y-DOPED BAZRO3 MATERIAL;

ATMOSPHERIC HUMIDITY; BARIUM COMPOUNDS; DEPOSITION; ELECTRIC PROPERTIES; HUMIDITY CONTROL; HUMIDITY SENSORS; IN SITU COMBUSTION; INTERNET PROTOCOLS; IONIC CONDUCTIVITY; IONIZATION OF LIQUIDS; MICROSENSORS; MOISTURE; NANOSENSORS; PARTICLE SIZE; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; STOICHIOMETRY; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION; VAPOR PRESSURE; VAPORS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ATMOSPHERIC TEMPERATURE;

EID: 70349260105     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.07.041     Document Type: Article

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