High temperature humidity sensors based on sputtered Y-doped BaZrO3 thin films

Sensors and Actuators, B: Chemical

Volumn 137, Issue 2, 2009, Pages 578-585

  Chen, XiaoXin ^a   Rieth, Loren ^a   Miller, Mark S ^a,b   Solzbacher, Florian ^a,b  

^a University of Utah   (United States)

^b UNIVERSITY OF UTAH   (United States)

Author keywords

High temperature; Humidity; Microsensor; Thin film; Y doped BaZrO3 material

Indexed keywords

ADSORPTION; AMORPHOUS FILMS; ANNEALING; ATOMS; ELECTRIC CONDUCTIVITY; ELECTRODEPOSITION; EMISSION SPECTROSCOPY; GAS ABSORPTION; GAS EMISSIONS; GAS SENSING ELECTRODES; HUMIDITY CONTROL; HUMIDITY SENSORS; INTERNET PROTOCOLS; IONIZATION OF LIQUIDS; LEAKAGE (FLUID); MICROSENSORS; MOISTURE; NANOSENSORS; OXIDE MINERALS; OXYGEN; OXYGEN VACANCIES; PEROVSKITE; PROTONS; SPACE PROBES; THIN FILM DEVICES; THIN FILMS; WATER VAPOR; YTTRIUM ALLOYS;

ANNEALING TEMPERATURES; ELECTRICAL CONDUCTIVITIES; ELECTRON-HOLE CONDUCTIONS; EXHAUST GAS COMPOSITIONS; FILM CONDUCTIVITIES; GAS SENSITIVITIES; HIGH OPERATING TEMPERATURES; HIGH TEMPERATURE; HUMID ATMOSPHERES; HUMIDITY; MICROSENSOR; OXYGEN IONS; PEROVSKITE OXIDES; POWER PLANT EFFICIENCIES; POWER SOURCES; PRESSURE OF WATERS; PROTON CONDUCTING; PROTON CONDUCTIONS; RESPONSE TIME; ROOT MEAN SQUARED; SENSING MECHANISMS; SENSITIVITY VALUES; SENSOR RESPONSE TIME; TEMPERATURE RANGES; XRD SPECTRUM; Y-DOPED BAZRO3 MATERIAL;

ATMOSPHERIC TEMPERATURE;

EID: 62649120390     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.01.024     Document Type: Article

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