Al-induced fullerene-like nanostructures in C-Al-N thin films

Materials Letters

Volumn 63, Issue 28, 2009, Pages 2479-2482

  Han, Y F ^a   Fu, T ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Aluminium; Carbon nitride; Fullerene like; Magnetron sputtering; Thin films

Indexed keywords

AL-CONCENTRATION; ALN; ALUMINIUM; DC MAGNETRON SPUTTERING; FULLERENE-LIKE NANOSTRUCTURES; ORDERED MICROSTRUCTURES; STRUCTURAL TRANSFORMATION; XPS ANALYSIS;

ALUMINUM; CARBON FILMS; CARBON NITRIDE; FULLERENES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MAGNETRONS; RAMAN SPECTROSCOPY; THIN FILMS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70349232187     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2009.08.042     Document Type: Article

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