Transmission electron microscopy observation on the early stages of sn-doped in2O3 film growth deposited on amorphous carbon films by DC magnetron sputtering

Applied Physics Express

Volumn 2, Issue 9, 2009, Pages

  Sato, Yasushi ^a   Nakamura, Shin Ichi ^a   Oka, Nobuto ^a   Shigesato, Yuzo ^a  

^a AOYAMA GAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON (A-C); DARK REGION; DC MAGNETRON SPUTTERING; DEPOSITION TIME; ELECTRON DIFFRACTION ANALYSIS; RING PATTERNS; SN-DOPED; TEM; TEM IMAGES; TRANSMISSION ELECTRON MICROSCOPY OBSERVATION;

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; MAGNETRONS; TIN; TRANSMISSION ELECTRON MICROSCOPY;

FILM GROWTH;

EID: 70349156713     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.2.095501     Document Type: Article

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