All-interferometric 6-Degree-of-freedom sensor based on the laser-self-mixing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7389, Issue , 2009, Pages

  Ottonelli, Simona ^a   De Lucia, Francesco ^a   Dabbicco, Maurizio ^a   Scamarcio, Gaetano ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BARI   (Italy)

Author keywords

Interferometry; Linear stage; Metrology; Multi DOFs measurements; Optical feedback; Self mixing; Semiconductor laser

Indexed keywords

DIFFERENTIAL MEASUREMENTS; DIODE LASERS; INTERFEROMETRIC SENSOR; LASER HEADS; LASER-SELF-MIXING; LINEAR DISPLACEMENTS; LINEAR RANGE; LINEAR STAGE; METROLOGY; MULTI DEGREES OF FREEDOM; MULTI-DOFS MEASUREMENTS; PROTOTYPE SYSTEM; SELF-MIXING; SELF-MIXING INTERFEROMETERS; SIMULTANEOUS DETECTION; SINGLE DEGREE OF FREEDOMS;

FEEDBACK; INTERFEROMETERS; LASERS; MIXING; OPTICAL DATA PROCESSING; OPTICAL TESTING; OPTICAL VARIABLES MEASUREMENT; SEMICONDUCTOR LASERS; SENSORS;

INTERFEROMETRY;

EID: 69949183700     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.827345     Document Type: Conference Paper

References (19)

1. Lin, S., T., "A laser interferometer for measuring straightness," Opt. Laser Technol. 33(3), 195-199 (2001).
2. Shi, P., Stjins, E., "New optical method for measuring small-angle rotations," Appl. Opt. 27(20), 4342-4344 (1988).
3. Zhang, J.,H., Menq, C., H., "A linear/angular interferometer capable of measuring large angular motion," Meas. Sci. Technol. 10(12), 1247-1253 (1999).
4. Wu, C., M., Chuang, Y., T., "Roll angular displacement measurement system with microradian accuracy," Sens. Actuators A 116, 145-149 (2004).
5. Fan, K., C., Chen, M., J., "A 6-degree-of-freedom measurement system for the accuracy of X-Y stage," Prec. Eng. 24, 15-23 (2000).
6. Bae, E., W., Kim, J., A., Kim, S., H., "Multi-degree-of-freedom displacement measurement system for millistructures," Meas. Sci. Technol. 12, 1495-1502 (2001).
7. Park, W., S., Cho, H., S., "Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation," Opt. Eng. 41(4), 860-871 (2002).
8. Liu, C., H., Jywe, W., Y., Hsu, C.,C., Hsu, T.,H., "Development of a laser-based high-precision six-degrees-offreedom motion errors measuring system for linear stage," Rev. Sci. Instrum. 76(5), 055110-55116 (2005).
9. Ottonelli, S., De Lucia, F., di Vietro, M., Dabbicco, M., Scamarcio, G., Mezzapesa, F.,P., "A Compact Three Degrees - of - Freedom Motion Sensor Based on the Laser - Self - Mixing Effect," IEEE Phot. Technol. Lett. 20(15), 1360-1362 (2008).
10. Ottonelli, S., De Lucia, F., Dabbicco, M., Scamarcio, G., "Simultaneous measurement of linear and transverse displacements by Laser - Self - Mixing," Appl. Opt. 48(9), 1784-1789 (2009).
11. Lang, R., Kobayashi, K., "External optical feedback effects on semiconductor injection laser properties," IEEE J. Quantum Electron. 16(3), 347-355 (1980).
12. de Groot, P., J., Gallatin, G.,M., Macomber, S.,H., "Ranging and velocimetry signal generation in a backscattermodulated laser diode," App. Opt. 27(1), 4475-4480 (1988).
13. Giuliani, G., Norgia, M., Donati, S., Bosch, T., "Laser diode self-mixing technique for sensing applications," J. Opt. A: Pure Appl. Opt. 4, S283-S294 (2002). (Pubitemid 35466730)
14. Acket, G.,A., Lenstra, D., Den Boef, J., Verbeek, B.,H., "The influence of feedback intensity on longitudinal mode properties and optical noise in index-guided semiconductor lasers," IEEE J. Quantum Electron. 20(10), 1163-1169 (1984).
15. Giuliani, G., Donati, S., Elsasser, W., "Measurement of linewidth enhancement factor of different semiconductor lasers in operating conditions," Proc. SPIE 6184, 6184D1-9 (2006).
16. Donati, S., Giuliani, G., Merlo, S., "Laser diode feedback interferometer for measurement of displacements without ambiguity," IEEE J. Quantum Electron. 31(1), 113-119 (1995).
17. Ottonelli, S., De Lucia, F., di Vietro, M., Dabbicco, M., Scamarcio, G., Mezzapesa, F., P., Plantamura, M., C., Polito, S., Florio, C., Ottonelli, F., P., "System for laser measurement of target motion," International Patent application, PCT/EP2008/005422 (2008).
18. Ottonelli, S., "Laser - Self - Mixing Interferometry for displacement sensors in mechatronics," PhD dissertation University of Bari Italy, (2009).
19. Zhang, J., Cai, L., "Interferometric straightness measurement system using triangular prism," Opt. Eng. 37(6), 1785-1789 (1998).