InAs/GaSb superlattice focal plane array infrared detectors: Manufacturing aspects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7298, Issue , 2009, Pages

  Rutz, Frank ^a   Rehm, Robert ^a   Schmitz, Johannes ^a   Fleissner, Joachim ^a   Walther, Martin ^a   Scheibner, Ralf ^b   Ziegler, Johann ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b AIM INFRAROT MODULE GMBH   (Germany)

Author keywords

Dual color; ICP; III V process technology; InAs GaSb superlattice; Multi wafer MBE; MWIR

Indexed keywords

DUAL-COLOR; ICP; III/V-PROCESS TECHNOLOGY; INAS/GASB SUPERLATTICE; MULTI-WAFER MBE; MWIR;

COLOR; CRYSTAL GROWTH; DETECTORS; GALLIUM ALLOYS; IMAGING SYSTEMS; INDUCTIVELY COUPLED PLASMA; INFRARED RADIATION; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; OPTOELECTRONIC DEVICES; SUBSTRATES; SUPERLATTICES;

TECHNOLOGY;

EID: 69949182919     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.819090     Document Type: Conference Paper

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