The helium ion microscope: A new tool for nanomanufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6648, Issue , 2007, Pages

  Postek, Michael T ^a   Vladár, Andras E ^a   Kramar, John ^a   Stern, Lewis A ^b   Notte, John ^b   McVey, Sean ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b ALIS Corporation   (United States)

Author keywords

Helium ion; HIM; Microscopy; Nanomanufacturing; Nanometrology; Scanning electron microscope; SEM

Indexed keywords

HELIUM ION MICROSCOPY (HIM); NANOMANUFACTURING; NANOMETROLOGY;

ELECTRON BEAMS; HELIUM; NANOTECHNOLOGY; PHOTODETECTORS; SCANNING ELECTRON MICROSCOPY; WAVELENGTH;

ION MICROSCOPES;

EID: 42149178855     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.742312     Document Type: Conference Paper

References (4)

1. Tondare, V. N. 2005. Quest for high brightness, monochromatic noble gas ion sources J. Vac. Sci. Technol. A, 23 (6) 1498-1508.
2. Postek, M. T, Vladar, A. E., Bennett, M.H 2002 Photomask metrology: Has anything really changed? SPIE 22nd BACUS Symposium on Photomask Technology 4489, 293-308
3. Postek, M. T. and Vlada, A. E. 2004 New Application of High Pressure/Environmental Microscopy to Semiconductor Inspection and Metrology SCANNING 26:11-17.
4. Ward, B. W., Notte, J. A., Economou, N. P. 2006 Helium ion microscope: A new tool for nanoscale microscopy and metrology J. Vac. Sci. Technol. B 24 (6) 2871-2875.