Simulation of secondary electron emission in helium ion microscope for overcut and undercut line-edge patterns

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7272, Issue , 2009, Pages

  Yamanaka, Takuya ^a   Inai, Kensuke ^a   Ohya, Kaoru ^a   Ishitani, Tohru ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

CD metrology; Edge contrast; Helium ion microscope; Monte Carlo simulation; Pseudo image formation; Scanning electron microscopy; Scanning ion microscope; Secondary electron emission

Indexed keywords

CD METROLOGY; EDGE CONTRAST; HELIUM ION MICROSCOPE; MONTE CARLO SIMULATION; PSEUDO-IMAGE FORMATION; SCANNING ION MICROSCOPE; SECONDARY ELECTRON EMISSION;

DATA STORAGE EQUIPMENT; ELECTRON BEAMS; ELECTRONS; HELIUM; ION BEAMS; ION MICROSCOPES; MEASUREMENTS; MONTE CARLO METHODS; PROCESS CONTROL; RADIOACTIVITY; SCANNING; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION; SILICON; SPONTANEOUS EMISSION;

IONS;

EID: 66649136724     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.813889     Document Type: Conference Paper

References (29)

1. B.W. Ward, J.A. Norte, N.P. Economou, J. Vac. Sci. Technol. B 24 (2006) 2871.
2. K. Inai, K. Ohya, T. Ishitani, J. Electron Microsc., 56 (2007) 163.
3. K. Ohya, T. Yamanaka, K. Inai, T. Ishitani, Nucí. Instr. and Meth. B, in press (2008).
4. P. Varga, H. Winter, in: Particle Induced Electron Emission II, Springer, Berlin, 1992, p.149.
5. R.A. Baragiola, E.V. Alonso, J. Ferron, A. Oriva-Florio, Surf. Sci. 90 (1979) 240.
6. P.M. Echenique, F. Flore, R.H. Ritchie, in: H. Ehrentrich, D. Turnbull (Eds.), Solid State Physics, Vol.43, Academic, Boston, 1990, p.230.
7. M. Rosier, in: R.A. Baragiola (Ed.), Ionization of Solids by Heavy Particles, Plenum, New York, 1985, p.14.
8. W. Eckstein, Computer Simulation of Ion-Solid Interactions, Springer, Berlin, 1991, p.83.
9. J.P. Biersack, L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257.
10. K. Ohya, Nucl. Instr. and Meth. B 195 (2002) 281.
11. K. Ohya, Nucl. Instr. and Meth. B 206 (2003) 52.
12. K. Nishimura, J. Kawata, K. Ohya, Nucl. Instr. and Meth. B 164-165 (2000) 903.
13. J.C. Ashley, J. Electron Spectrosc. Relat. Phenom., 50 (1990) 323.
14. D. Palik, Handbook of Optical Constants of Solids, Academic, Boston, 1985, p.286.
15. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interface Anal., 17 (1991) 911.
16. H.J. Fitting, J. Reinhardt, Phys. Status Solidi, A 88 (1985) 245.
17. D.R. Lite (Ed.), Handbook of Chemistry and Physics, CRC, Boca Raton, 1993, p.12 105.
18. K. Ohya, K. Inai, H. Kuwada, T. Hayashi, M. Saito, Surf. Coat. Technol., 22-23 (2008) 5310.
19. R.A. Baragiola, E.V. Alonso, A. Oriva Florio, Phys. Rev. B 19 (1979) 121.
20. J. Morgan, J. Notte, R. Hill, G. Ward, Microscopy Today, July 2006, p.24.
21. B. Thompson, J. Notte, L. Scipioni, L. Stern, S. Ogawa, 28th Annual LSI Tesing Symposium, Advance Testing Equipment: Novel Microscope Techniques (35), 12-14 November 2008, Osaka, Japan.
22. D.C. Joy, Scanning 17 (1995) 270.
23. L. Reimer, C. Tolkamp, Scanning 3 (1980) 35.
24. G.F. Dione, J. Appl. Phys. 44 (1973) 5361.
25. W. Czaja, J. Appl. Phys. 37 (1966) 4236.
26. G.F. Dione, J. Appl. Phys. 46 (1975) 3347.
27. th Conference on X-ray Optics and Microanalysis, Hermann, Paris, 1966, p.168.
28. T.E. Rothwell, P.E. Rüssel, in: D.E. Newbury (Ed.), Microbeam Analysis - 1988, San Francisco, San Francisco, 1988, p.149.
29. I.M. Bronstein, B.S. Fraiman, in : Vtorichnaka Elektronnaka Emissiya, Nauka, Moskva, 1969, p.340.