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The exact size of the electron probe depends on several parameters of the (S)TEM such as the spherical aberration and other order aberration coefficients of the lenses, brightness and size of the electron source, demagnification power of the condenser lenses, diffraction effects, convergence angles, defocus values, electron wavelength.... Nanoprobes are actually obtained with typical semi-converge angle values from 1 to 10 mrad while sub nanometrical probes have typical convergence semi-angles of 10 to 50 mrads. (S)TEM typical voltages are from 60 to 300 keV
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