The influence of moisture on atmospheric pressure plasma etching of PA6 films

Current Applied Physics

Volumn 10, Issue 1, 2010, Pages 230-234

  Gao, Zhiqiang ^a,b   Peng, Shujing ^a,b   Sun, Jie ^a,b   Yao, Lan ^a,b   Qiu, Yiping ^a,b  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b DONGHUA UNIVERSITY   (China)

Author keywords

Atmospheric pressure plasma jet (APPJ); Moisture regain (MR); PA6 film; Relative humidity (RH); Surface analysis; XPS

Indexed keywords

ATMOSPHERIC PRESSURE PLASMA JET (APPJ); ATMOSPHERIC PRESSURE PLASMA JETS; ATMOSPHERIC PRESSURE PLASMA TREATMENT; ATMOSPHERIC PRESSURE PLASMAS; CONTACT-ANGLE MEASUREMENTS; ETCHING PROCESS; ETCHING RATE; FILM SURFACES; PA6 FILM; PLASMA GAS; POLYAMIDE 6; RELATIVE HUMIDITIES; RELATIVE HUMIDITY (RH); SUBSTRATE MATERIAL; XPS;

ANGLE MEASUREMENT; ATMOSPHERIC PRESSURE; ATMOSPHERICS; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; HELIUM; PHOTORESISTS; PLASMA ACCELERATORS; PLASMA APPLICATIONS; PLASMA ETCHING; PLASMA JETS; PLASMA SOURCES; REGAIN; SURFACE ANALYSIS; SURFACE ROUGHNESS; SURFACES; X RAY PHOTOELECTRON SPECTROSCOPY;

ATMOSPHERIC HUMIDITY;

EID: 69249214007     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2009.05.035     Document Type: Article

References (20)

1. Qiu Y., Zhang C., Hwang Y.J., Bure B.L., and McCord M. Journal of Adhesion Science and Technology 16 (2002) 449
2. Qiu Y., Hwang Y.J., Zhang C., Bure B.L., and McCord M. Journal of Adhesion Science and Technology 16 (2002) 99
3. Qiu Y., Deflon S., and Schwartz P. Journal of Adhesion Science and Technology 7 (1993) 1041
4. Ren Y., Wang C., and Qiu Y. Applied Surface Science 253 (2007) 9283
5. Liu L., Jiang Q., Zhu T., Guo X., Sun Y., Guan Y., and Qiu Y. Journal of Applied Polymer Science 102 (2006) 242
6. Liston E.M., Martinu L., and Wertheimer M.R. Journal of Adhesion Science and Technology 7 (1993) 1091
7. Jeong J.Y., Babayan S.E., Schutze A., Tu V.J., Park J., Henins I., Selwyn G.S., and Hicks R.F. Journal of Vacuum Science and Technology A 17 (1999) 2581
8. Jeong J.Y., Babayan S.E., and Tu V.J. Plasma Sources Science & Technology 7 (1998) 282
9. Park J., Henins I., and Herrmann H.W. Applied Surface Science 76 (2000) 288
10. Carroll B.J. Journal of Colloid and Interface Science 57 (1976) 488
11. Kim K.N., Lee Y.J., Kyong S.J., and Yeom G.Y. Surface & Coatings Technology 177/178 (2004) 752
12. S.G. Park, H.Y. Song, B.H. O, Journal of Vacuum Science and Technology B 19 (2001) 1841.
13. Upadhyay D., Anderson C., and Brown N. Colloids and Surfaces A - Physicochemical and Engineering Aspects 248 (2004) 47
14. Pappas D., Bujanda A., and Demaree J. Journal of Applied Polymer Science 201 (2006) 4384
15. Allred R.E., and Schimpf W.C. Journal of Adhesion Science and Technology 8 (1994) 383
16. Tan B.J., Xiao Y.O., and Suib S.L. Chemistry of Materials 3 (1991) 652
17. M.I. Kohan, Nylon Plastics Handbook, Carl Hanser, Munich, 1995.
18. Saijo K., Arimoto O., Hashimoto T., and Fukuda M. Polymer 35 (1994) 496
19. Dobb M.G., Park C.R., and Robson R.M. Journal of Materials Science 27 (1992) 3876
20. Dobb M.G., Johnson D.J., and Majeed A. Polymer 20 (1979) 1284