Growth defects in PVD hard coatings

Vacuum

Volumn 84, Issue 1, 2009, Pages 209-214

  Panjan, P ^a   Cekada M ^a   Panjan, M ^a   Kek Merl, D ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

3D stylus profilometry; Focused ion beam; Growth defects; PVD hard coatings

Indexed keywords

3D STYLUS PROFILOMETRY; ANALYTICAL TECHNIQUES; COATING APPLICATION; DEPOSITION PARAMETERS; GROWTH DEFECTS; PRE-TREATMENT; PVD COATINGS; PVD HARD COATINGS; SEM; STYLUS PROFILOMETER; SUBSTRATE MATERIAL; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON; VACUUM CHAMBERS;

DEFECT DENSITY; DEFECTS; FOCUSED ION BEAMS; PROFILOMETRY; THREE DIMENSIONAL; VACUUM DEPOSITION;

HARD COATINGS;

EID: 69249213925     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.05.018     Document Type: Article

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