SEM study of defects in PVD hard coatings

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 252-256

  Cekada M ^a   Panjan, P ^a   Kek Merl, D ^a   Panjan, M ^a   Kapun, G ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b NATIONAL INSTITUTE OF CHEMISTRY   (Slovenia)

Author keywords

Defects; Hard coatings; PVD

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFECTS; MULTILAYER FILMS; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION;

ION PLATING DEPOSITION SYSTEMS; MULTILAYER HARD COATINGS; SUBSTRATE SURFACES;

HARD COATINGS;

EID: 35248816851     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.005     Document Type: Article

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