Growth effects in carbon coatings deposited by magnetron sputtering

Surface and Coatings Technology

Volumn 168, Issue 2-3, 2003, Pages 169-178

  Vetter, J ^a   Stuber M ^b   Ulrich, S ^b  

^a Metaplas Ionon GmbH   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Amorphous carbon; Friction; Growth defects; Sputtering; Wear

Indexed keywords

AMORPHOUS ALLOYS; CARBON; MAGNETRON SPUTTERING; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY;

AMORPHOUS CARBON COATINGS;

COATING TECHNIQUES;

CARBON; COATING; FRICTION; MORPHOLOGY; SPUTTERING; WEAR RESISTANCE;

EID: 0037461443     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00010-0     Document Type: Article

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