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Journal of Applied Physics

Volumn 106, Issue 3, 2009, Pages

Pinning at template feature edges for step and flash imprint lithography

(4) Chauhan, Siddharth a Palmieri, Frank a Bonnecaze, Roger T a Willson, C Grant a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR LIQUID INTERFACES; APPLIED FORCES; BULK LIQUID; DRIVING FORCES; PROCESS WINDOW; RADIUS OF CURVATURE; RESIDUAL LAYER THICKNESS; STEP-AND-FLASH IMPRINT LITHOGRAPHY;

LIQUIDS; NANOIMPRINT LITHOGRAPHY; PRESSURE GRADIENT; WINDOWS;

PHASE INTERFACES;

EID: 69149108766 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3122599 Document Type: Article

Times cited : (9)

References (9)

1
- 35148818760
- Toward 22 nm for unit process development using step and flash imprint lithography
- DOI 10.1117/12.718155, Emerging Lithographic Technologies XI
- G. M. Schmid, E. Thompson, N. Stacey, D. J. Resnick, D. L. Olynick, and E. H. Anderson, Proc. SPIE 0277-786X 6517, 651717 (2007). 10.1117/12.718155 (Pubitemid 47550768)
- (2007) Proceedings of SPIE - The International Society for Optical Engineering , vol.6517 , Issue.PART 1 , pp. 651717
- Schmid, G.M.¹ Thompson, E.² Stacey, N.³ Resnick, D.J.⁴ Olynick, D.L.⁵ Anderson, E.H.⁶

2
- 0032625408
- 0277-786X,. 10.1117/12.351155
- M. Colburn, S. Johnson, M. Stewart, S. Damle, T. C. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C. G. Willson, Proc. SPIE 0277-786X 3676, 379 (1999). 10.1117/12.351155
- (1999) Proc. SPIE , vol.3676 , pp. 379
- Colburn, M.¹ Johnson, S.² Stewart, M.³ Damle, S.⁴ Bailey, T.C.⁵ Choi, B.⁶ Wedlake, M.⁷ Michaelson, T.⁸ Sreenivasan, S.V.⁹ Ekerdt, J.¹⁰ Willson, C.G.¹¹

3
- 33847179788
- Experimental and theoretical investigation on surfactant segregation in imprint lithography
- DOI 10.1021/la061736y
- K. Wu, X. Wang, E. K. Kim, C. G. Willson, and J. G. Ekerdt, Langmuir 0743-7463 23, 1166 (2007). 10.1021/la061736y (Pubitemid 46308466)
- (2007) Langmuir , vol.23 , Issue.3 , pp. 1166-1170
- Wu, K.¹ Wang, X.² Kim, E.K.³ Willson, C.G.⁴ Ekerdt, J.G.⁵

4
- 0032649191
- 0743-7463,. 10.1021/la981727s
- T. Nishino, M. Meguro, K. Nakamae, M. Matsushita, and Y. Ueda, Langmuir 0743-7463 15, 4321 (1999). 10.1021/la981727s
- (1999) Langmuir , vol.15 , pp. 4321
- Nishino, T.¹ Meguro, M.² Nakamae, K.³ Matsushita, M.⁴ Ueda, Y.⁵

5
- 69149097064
- 1071-1023 (in press).
- S. Chauhan, F. Palmieri, R. T. Bonnecaze, and C. G. Willson, J. Vac. Sci. Technol. B 1071-1023 (in press).
- J. Vac. Sci. Technol. B
- Chauhan, S.¹ Palmieri, F.² Bonnecaze, R.T.³ Willson, C.G.⁴

6
- 33846849481
- Air bubble formation and dissolution in dispensing nanoimprint lithography
- DOI 10.1088/0957-4484/18/2/025303, PII S0957448407311768
- X. Liang, H. Tan, Z. Fu, and S. Y. Chou, Nanotechnology 0957-4484 18, 025303 (2007). 10.1088/0957-4484/18/2/025303 (Pubitemid 46212141)
- (2007) Nanotechnology , vol.18 , Issue.2 , pp. 025303
- Liang, X.¹ Tan, H.² Fu, Z.³ Chou, S.Y.⁴

7
- 0003440781
- (Academic, London).
- J. N. Israelachvili, Intermolecular and Surface Forces: With Applications to Colloidal and Biological Systems (Academic, London, 1985).
- (1985) Intermolecular and Surface Forces: With Applications to Colloidal and Biological Systems
- Israelachvili, J.N.¹

8
- 69149097659
- Ph.D. thesis, The University of Texas at Austin.
- S. Reddy, " Fluid and solid mechanics in the step and flash imprint lithography process.," Ph.D. thesis, The University of Texas at Austin, 2006.
- (2006) Fluid and Solid Mechanics in the Step and Flash Imprint Lithography Process
- Reddy, S.¹

9
- 0034316495
- Step and flash imprint lithography: Template surface treatment and defect analysis
- DOI 10.1116/1.1324618
- T. Bailey, B. J. Choi, M. Colburn, M. Meissl, S. Shaya, J. G. Ekerdt, S. V. Sreenivasan, and C. G. Willson, J. Vac. Sci. Technol. B 1071-1023 18, 3572 (2000). 10.1116/1.1324618 (Pubitemid 32088259)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3572-3577
- Bailey, T.¹ Choi, B.J.² Colburn, M.³ Meissl, M.⁴ Shaya, S.⁵ Ekerdt, J.G.⁶ Sreenivasan, S.V.⁷ Willson, C.G.⁸

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