Energetic nanoporous silicon devices

Journal of Microelectromechanical Systems

Volumn 18, Issue 4, 2009, Pages 799-807

  Currano, Luke J ^a   Churaman, Wayne A ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Explosive; Nanoenergetic; Nanoporous silicon

Indexed keywords

ENERGETIC MATERIAL; FAILURE MECHANISM; HOTWIRE; MICRO ELECTRO MECHANICAL SYSTEM; MICROMACHINED; MONOLITHIC INTEGRATION; NANO-POROUS; NANOENERGETIC; NANOPOROUS SILICON; NEW MATERIAL; ON-CHIP INTEGRATION; PATTERNED ARRAYS; PROPAGATION VELOCITIES;

MEMS; MICROELECTROMECHANICAL DEVICES;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 68849087995     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2023883     Document Type: Article

References (19)

1. C. Rossi, K. Zhang, D. Esteve, P. Alphonse, P. Tailhades, and C. Vahlas, "Nanoenergetic materials for MEMS: A review," J. Microelectromech. Syst., vol. 16, no. 4, pp. 919-931, Aug. 2007.
2. D. Kovalev, V. Y. Timoshenko, N. Kunzner, E. Gross, and F. Koch, "Strong explosive interaction of hydrogenated porous silicon with oxygen at cryogenic temperatures," Phys. Rev. Lett., vol. 87, no. 6, p. 068 301, Aug. 2001.
3. F. V. Mikulec, J. D. Kirtland, and M. J. Sailor, "Explosive nanocrystalline porous silicon and its use in atomic emission spectroscopy," Adv. Mater., vol. 14, no. 1, pp. 38-41, Jan. 2002.
4. D. Clement, J. Diener, and D. Kovalev, "Explosive porous silicon: From laboratory accident to industrial application," in Proc. 35th Int. Conf. ICT, 2004, pp. 5-1-5-11.
5. D. Clement, J. Diener, E. Gross, N. Kunzner, V. Y. Timoshenko, and D. Kovalev, "Highly explosive nanosilicon-based composite materials," Phys. Stat. Sol. A, vol. 202, no. 8, pp. 1364-1367, May 2005.
6. M. du Plessis, "Properties of porous silicon nanoexplosive devices," Sens. Actuators A, Phys., vol. 135, no. 2, pp. 666-674, Apr. 2007.
7. M. du Plessis, "Integrated nanoporous silicon nanoexplosive devices," in Proc. IEEE Symp. Ind. Electron., 2007, pp. 1574-1579.
8. M. du Plessis, "Nanoporous silicon explosive devices," Mater. Sci. Eng. B, vol. 147, no. 2/3, pp. 226-229, Feb. 2008.
9. L. Canham, Ed., Properties of Porous Silicon. Exeter, U.K.: Short Run Press, 1997.
10. V. Lysenko, P.H. Roussel, B. Remaki, G. Delhomme, A. Dittmar, and D. Barbier, "Study of nanoporous silicon with low thermal conductivity as thermal insulating material," J. Porous Mater., vol. 7, no. 1-3, pp. 177-182, Jan. 2000.
11. D. R. Lide. Ed., CRC Handbook of Chemistry and Physics, 78th ed. Boca Raton, FL: CRC Press, 1997.
12. G. Chen and P. Hui, "Thermal conductivities of evaporated gold films on silicon and glass," Appl. Phys. Lett., vol. 74, no. 20, pp. 2942-2944, May 1999.
13. G. Langer, J. Hartman, and M. Reichling, "Thermal conductivity of thin metallic films measured by photothermal profile analysis," Rev. Sci. Instrum., vol. 68, no. 3, pp. 1510-1513, Mar. 1997.
14. Q. G. Zhang, B. Y. Cao, X. Zhang, M. Fujii, and K. Takahashi, "Size effects on the thermal conductivity of polycrystalline platinum nanofilms," J. Phys., Condens. Matter, vol. 18, no. 34, pp. 7937-7950, Aug. 2006.
15. Q. Song, S. Xia, S. Chen, and Z. Cui, "A new structure for measuring the thermal conductivity of thin film," in Proc. Int. Conf. Inf. Acquisition, 2004, pp. 77-79.
16. Y. S. Touloukian, R. W. Powell, C. Y. Ho, and P. G. Klemens, Thermophysical Properties of Matter. New York: Plenum, 1970.
17. A. Grossman and C. Ortega, "Chemical composition of 'fresh' porous silicon," in Properties of Porous Silicon, L. Canham, Ed. Exeter, U.K.: Short Run Press, 1997, pp. 145-157.
18. J. Schimkat, "Contact measurements providing basic design data for microrelay actuators," Sens. Actuators A: Phys., vol. 73, no. 1/2, pp. 138-143, Mar. 1999.
19. S. Majumdaer, N. E. McGruer, G. G. Adams, P. M. Zavracky, R. H. Morrison, and J. Krim, "Study of contacts in an electrostatically actuated microswitch," Sens. Actuators A, Phys., vol. 93, no. 1, pp. 19-26, Aug. 2001.