Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 8, 2009, Pages 1716-1724

  Khoo, Ter Fong ^a   Dang, Dinh Huy ^a   Friend, James ^a   Oetomo, Denny ^b   Yeo, Leslie ^a  

^a MONASH UNIVERSITY   (Australia)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COUPLED VIBRATIONS; EXCITATION FREQUENCY; FLEXURAL VIBRATIONS; HARDENED STEEL; LEAD ZIRCONATE TITANATE; LIMITING FACTORS; MICRO ROBOTICS; MICROMOTOR; ORTHOGONAL DIRECTIONS; PIEZOELECTRIC MOTORS; POWER DENSITIES; ROTATION SPEED;

ACTUATORS; PIEZOELECTRIC TRANSDUCERS; ROTATION; SEMICONDUCTING LEAD COMPOUNDS; ULTRASONICS;

PIEZOELECTRICITY;

LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; ZIRCONIUM;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; INSTRUMENTATION; MICROTECHNOLOGY; REPRODUCIBILITY; ROBOTICS; VIDEORECORDING;

EQUIPMENT DESIGN; LEAD; MICROTECHNOLOGY; REPRODUCIBILITY OF RESULTS; ROBOTICS; TITANIUM; VIDEO RECORDING; ZIRCONIUM;

EID: 68649124362     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.1236     Document Type: Conference Paper

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