Direct patterned etching of silicon dioxide and silicon nitride dielectric layers by inkjet printing

Solar Energy Materials and Solar Cells

Volumn 93, Issue 10, 2009, Pages 1865-1874

  Lennon, Alison J ^a   Ho Baillie, Anita W Y ^b   Wenham, Stuart R ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b Solar Sailor   (Australia)

Author keywords

Dielectric; Etch; Inkjet; Silicon; Solar cell

Indexed keywords

DIELECTRIC; DIELECTRIC LAYER; ETCH; HAZARDOUS CHEMICALS; INK-JET METHODS; INK-JET PRINTING; INKJET; PATTERNED DIELECTRIC; PATTERNING METHODS; SILICON DIOXIDE; SILICON DIOXIDE LAYERS; SILICON SURFACES; SOLAR-CELL APPLICATIONS;

CELL MEMBRANES; PHOTOVOLTAIC CELLS; SILICA; SILICON NITRIDE; SOLAR CELLS;

ETCHING;

EID: 68449086104     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2009.06.028     Document Type: Article

References (31)

1. Green M.A. Silicon Solar Cells: Advanced Principles and Practice (1995), Bridge Printery, Sydney
2. Kovacs G.T.A., Maluf N.I., and Petersen K.E. Bulk micromachining of silicon. Proc. IEEE 86 (1998) 1536-1551
3. Zhao J., Wang A., and Green M.A. 24.5% Efficiency silicon PERT cells on MCZ substrates and 24.7% efficiency PERL cells on FZ substrates. Prog. Photovolt.: Res. Appl. 7 (1999) 471-474
4. Woehl R., Hörteis M., and Glunz S. Analysis of the optical properties of screen-printed and aerosol-printed and plated fingers of silicon solar cells. Adv. Optoelectron. 2008 (2008) 1-7
5. M. Bähr, S. Kim, S. Sridharan, C. Khadilkar, A. Shaikh, I. Köhler, M. Reichardt, M. Kumar, A new approach for front side metallisation of industrial type silicon solar cells using a structurization by etching, in: Proceedings of the 22nd European Photovoltaic Solar Energy Conference, Milan, Italy, 2007, pp. 1015-1019.
6. Wenham S. Buried contact silicon solar cells. Prog. Photovolt: Res. Appl. 1 (1993) 3-10
7. B.S. Tjahjono, J.H. Guo, Z. Hameiri, L. Mai, A. Sugianto, S. Wang, S.R. Wenham, High efficiency solar cell structure through the use of laser doping, in: Proceedings of the 22nd European Photovoltaic Solar Energy Conference, 3-7 September 2007, Milan, Italy, pp. 966-969.
8. Kray D., Fell A., Hopman S., Mayer K., Willeke G., and Glunz S. Laser chemical processing (LCP)-A versatile tool for microstructuring applications. Appl. Phys. A 93 (2008) 99-103
9. Green M.A., Basore P.A., Chang N., Clugston D., Egan R., Evans R., Hogg D., Jarnason S., Keevers M., Lasswell P., O'Sullivan J., Schubert U., Turn A., Wenham S.R., and Young T. Crystalline silicon on glass (CSG) thin-film solar cell modules. Sol. Energy 77 (2004) 857-863
10. Lennon A., Utama R., Lenio M., Ho-Baillie A., Kuepper N., and Wenham S. Forming openings to semiconductor layers of silicon solar cells by inkjet printing. Sol. Energy Mater. Sol. Cells 92 (2008) 1410-1415
11. J. Specht, D. Biro, N. Mingirulli, M. Aleman, U. Belledin, R. Efinger, D. Erath, L. Gautero, A. Lemke, D. Stüwe, J. Rentsch, R. Preu, Using hotmelt-inkjet as a structuring method for higher efficiency industrial silicon solar cells, in: Proceedings of the Digital Fabrication 2008 Conference, 6-11 September 2008, Pittsburgh, USA, pp. 912-917.
12. Horteis M., and Glunz S.W. Fine line printed silicon solar cells exceeding 20% efficiency. Prog. Photovolt.: Res. Appl. 16 (2008) 555-560
13. Mette A., Richter P.L., Hörteis M., and Glunz S.W. Metal aerosol jet printing for solar cell metallisation. Prog. Photovolt.: Res. Appl. 15 (2007) 621-627
14. Wenham S.R., Chan B.O., Honsberg C.B., and Green M.A. Beneficial and constraining effects of laser scribing in buried contact solar cells. Prog. Photovolt: Res. Appl. 5 (1997) 131-137
15. International Finance Corporation, Environmental, Health, and Safety Guidelines for Semiconductors & Other Electronics Manufacturing, 30 April 2007, p. 10.
16. Spierings G.A.C.M. Wet chemical etching of silicate glasses in hydrofluoric acid based solutions. J. Mat. Sci. 28 (1993) 6261-6273
17. Kikyuama H., Miki N., Saka K., Takano J., Kawanabe I., Miyashita M., and Ohmi T. Principles of wet chemical processing in ULSI microfabrication. IEEE Trans. Semicond. Manuf. 4 (1991) 26-35
18. Williams K.R., Gupta K., and Waslik M. Etch rates for micromachining processing - Part II. J. Microelectomech. Syst. 12 (2003) 761-777
19. Dimatix Application Note, Dimatix materials printer: jettable fluid formulation guidelines, 〈http://www.dimatix.com/files/Dimatix-Materials-Printer-Jettable-Fl uid-Formulation-Guidelines.pdf〉.
20. 2 in acidic fluoride solutions. J. Electrochem. Soc. 118 (1971) 1772-1775
21. Madou M.J. Fundamentals of Microfabrication (2002), CRC Press, Boca Raton, FL p. 135
22. Deegan R., Bakajin O., Dupont T.F., Huber G., Nagel S.R., and Witten T.A. Capillary flow as the cause of ring stains from dried liquid drops. Nature 389 (1997) 827-829
23. Seidel H., Csepregi L., Heuberger A., and Baumgartel H. Anisotropic etching of crystalline silicon in alkaline solutions. J. Electrochem. Soc. 137 (1990) 3612-3626
24. N. Borojevic, A. Ho-Baillie, R. Utama, A. Lennon, M. Lenio, A. Karpour, S. Wenham, Inkjet texturing for high efficiency silicon solar cells, in: Proceedings of the 23rd European Photovoltaic Solar Energy Conference, 1-5 September 2008, Valencia, Spain, pp. 1829-1832.
25. Wenham S. Buried contact silicon solar cells. Prog. Photovolt: Res. Appl. 1 (1993) 3-10
26. B.S. Tjahjono, J.H. Guo, Z. Hameiri, L. Mai, A. Sugianto, S. Wang, S. Wenham, in: Proceedings of the 22nd European Photovoltaic Solar Energy Conference, 3-7 September 2007, Milan, Italy, pp. 966-969.
27. K. Ozawa, T. Usui, H. Takahashi, S. Sakai, Development of a femtoliter piezo inkjet head for high resolution printing, in: Proceedings of the Digital Fabrication 2007 Conference, 16-21 September 2007, Anchorage, Alaska, USA, pp. 898-901.
28. FUJIFILM Dimatix, Materials Printer & Cartridge DMP-2831& DMC11601/11610 Datasheet (Rev 0.2), 〈http://www.dimatix.com/files/DMP2831-Datasheet.pdf〉, 2006, p. 2.
29. T. Xu, D. Albertalli, Achieving high accuracy and precision inkjet drop placement using imperfect components in and imperfect environment, in: Proceedings of the IMID/IDMC 2006 Conference, 22-25 August 2006, Daegu, Korea, pp. 1660-1665.
30. de Gans B.-J., and Schubert U.-S. Inkjet printing of polymer micro-arrays and libraries: instrumentation, requirements and perspectives. Macromol. Rapid. Commun. 24 (2003) 659-666
31. iti Corporation, MDS 300 Materials Deposition System, 〈http://www.iticorp.com/pdf/iTi-MDS300-0208.pdf〉, 2008.