Laser Chemical Processing (LCP)-A versatile tool for microstructuring applications

Applied Physics A: Materials Science and Processing

Volumn 93, Issue 1, 2008, Pages 99-103

  Kray, D ^a   Fell, A ^a   Hopman, S ^a   Mayer, K ^a   Willeke, G P ^a   Glunz, S W ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE SEATS; CHEMICAL INDUSTRY; ETCHING; LASERS; METAL CLADDING; NONMETALS; PHOSPHORUS; PHOTOCHEMICAL REACTIONS; SILICON;

APPLICATIONS.; CARRIER LIQUIDS; CHEMICAL-; LASER CHEMICAL PROCESSING; LASER PROCESSING; LASER SOURCES; LIQUID JETS; MICROSTRUCTURING; MULTIPLE APPLICATIONS; SELECTIVE DOPING; VERSATILE TOOLS;

LASER CHEMISTRY;

EID: 49649120842     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-008-4723-8     Document Type: Article

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