Su-8-based nanocomposites for acoustical matching layer

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 7, 2009, Pages 1483-1489

  Wang, Shengxiang ^a,b,c   Campistron, Pierre ^a,b,c   Carlier, Julien ^a,b,c   Callens Debavelaere, Dorothee ^a,b,c   Nongaillard, Bertrand ^a,b,c   NDieguene, Assane ^a,b,c   Nassar, Georges ^a,b,c   Soyer, Caroline ^a,b,c   Zhao, Xingzhong ^d  

^a UNIV LILLE   (France)

^b INSTITUT D ELECTRONIQUE   (France)

^c CNRS   (France)

^d WUHAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC CHARACTERIZATION; ACOUSTICAL PERFORMANCE; BI-LAYER; CONCENTRATION OF; HIGH FREQUENCY; HIGH FREQUENCY TRANSDUCERS; LAB-ON-CHIP; LAB-ON-CHIP TECHNOLOGY; LONGITUDINAL WAVE VELOCITY; MATCHING LAYER; PIEZOCOMPOSITES; POTENTIAL APPLICATIONS; ROOM TEMPERATURE; TIO2 NANO-PARTICLES;

ACOUSTICS; FLUIDIC LOGIC DEVICES; MONOLAYERS; NANOCOMPOSITES; NANOPARTICLES; SILICON OXIDES;

ACOUSTIC IMPEDANCE;

EPOXIDE; NANOCOMPOSITE; POLYMER; SILICON DIOXIDE; SU 8 COMPOUND; SU-8 COMPOUND; TITANIUM; TITANIUM DIOXIDE;

ACOUSTICS; ALGORITHM; BIOTECHNOLOGY; CHEMICAL MODEL; CHEMISTRY; IMPEDANCE; LETTER; MICROELECTROMECHANICAL SYSTEM; TRANSDUCER;

ACOUSTICS; ALGORITHMS; BIOTECHNOLOGY; ELECTRIC IMPEDANCE; EPOXY COMPOUNDS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MODELS, CHEMICAL; NANOCOMPOSITES; POLYMERS; SILICON DIOXIDE; TITANIUM; TRANSDUCERS;

EID: 68349090281     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.1204     Document Type: Article

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