Self-focused high frequency ultrasonic transducers based on ZnO piezoelectric films

Applied Physics Letters

Volumn 90, Issue 11, 2007, Pages

  Zhou, Q F ^a   Sharp, C ^a   Cannata, J M ^a   Shung, K K ^a   Feng, G H ^a   Kim, E S ^a  

^a University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATCHING LAYER; MICROSTRUCTURE IMAGING; PIEZOELECTRIC FILMS; SILICON SUBSTRATE;

BANDWIDTH; CRYSTAL ORIENTATION; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ULTRASONIC TRANSDUCERS;

EID: 33947319496     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2712813     Document Type: Article

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