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Volumn 19, Issue 5, 2009, Pages
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New release technique of a thick sacrificial layer and residue effects on novel half-coaxial transmission line filters
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Author keywords
[No Author keywords available]
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Indexed keywords
COAXIAL TRANSMISSION LINES;
FABRICATION YIELD;
GAP FILTER;
MICROMACHINED;
MICROMACHINED DEVICES;
OXYGEN PLASMA ASHING;
PROCESS TIME;
RELEASE METHODS;
REPRODUCIBILITIES;
SACRIFICIAL LAYER;
ELECTRIC LINES;
LEAKAGE (FLUID);
LIGHT TRANSMISSION;
MICROMACHINING;
OXYGEN;
PLASMAS;
TRANSMISSION LINE THEORY;
X RAY PHOTOELECTRON SPECTROSCOPY;
AIR FILTERS;
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EID: 68249135725
PISSN: 09601317
EISSN: 13616439
Source Type: Journal
DOI: 10.1088/0960-1317/19/5/055018 Document Type: Article |
Times cited : (7)
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References (15)
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