Self-assembly of ordered semiconductor nanoholes by ion beam sputtering

Advanced Materials

Volumn 21, Issue 28, 2009, Pages 2865-2869

  Wei, By Qiangmin ^a   Zhou, Xiuli ^b   Joshi, Bhuwan ^c   Chen, Yanbin ^a   Li, Kun Dar ^a   Wei, Qihuo ^a,c   Sun, Kai ^a   Wang, Lumin ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^c KENT STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGETIC ION; GE ATOM; GE SURFACES; HOLE FORMATION; HOLE SIZE; ION ENERGIES; ION-BEAM SPUTTERING; LARGE ASPECT RATIO; NANOHOLES; ORDERED DOMAINS; SELF-ADJUSTING; SHORT RANGE ORDERING;

AGGLOMERATION; ASPECT RATIO; ELECTRON BEAMS; FOCUSED ION BEAMS; GERMANIUM; IONS; SELF ASSEMBLY; SEMICONDUCTING GERMANIUM; SPUTTERING;

ION BOMBARDMENT;

EID: 68149097051     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200803258     Document Type: Article

References (24)

1. S. Facsko, T. Dekorsy, C. Koerdt, C. Yrappe, H. Kurz, A. Vogt, H. L Hartnagel, Science 1999, 285, 1551.
2. B. Ziberi, F. Frost, M. Tartz, H. Neumann, B. Rauschenbach, Appl. Phys. Lett. 2008, 92, 063102.
3. Q. M. Wei, J. Lian, W. Lu, L. M. Wang, Phys. Rev. Lett. 2008, 100, 076103.
4. R. Gago, L. Vázquez, O. Plantevin, T. H. Metzger, J. Muñoz-García, R. Cuerno, M. Castro, Appl. Phys. Lett. 2006, 89, 233101.
5. A.-D. Brown, J. Erlebacher, W. L Chan, E. Chason, Phys. Rev. Lett. 2005, 95, 056101.
6. R. Bradly, J. Harper, J. Vac. Sci. Technol. A 1988, 6, 2390.
7. R. Cuerno, A.-L. Barabási, Phys. Rev. Lett. 1995, 74, 4746.
8. J. Erlebacher, M.J. Aziz, E. Chason, M. B. Sinclair, J. A. Flora, Phys. Rev. Lett. 1999, 82, 2330.
9. Q. M. Wei, W. X. Li, K. Sun, J. Lian, L. M. Wang, j. Appl. Phys. 2008, 103, 074306.
10. M. Castro, R. Cuerno, L. Vázquez, R. Gago, Phys. Rev. Lett. 2005, 94, 016102.
11. P. F. A. Alkemade, Phys. Rev. Lett. 2006, 96, 107602.
12. J. Muñoz-García, M. Castro, R. Cuerno, Phys. Rev. Lett. 2006, 96, 086101.
13. R. Gago, R. Cuerno, M. Varela, C. Ballesteros, J. M. Albella, Appl. Phys. Lett. 2001, 78, 3316.
14. B. Ziberi, F. Frost, B. Rauschenbach, Appl. Phys. Lett. 2006, 88, 173115.
15. R. Gago, L. Vázquez, O. Plantevin, J. A. Sánchez- García, M. Varela, M. C Ballesteros, J. M. Albela, T. H. Metzger, Phys. Rev. B 2006, 73, 155414.
16. F. Frost, A. Schindler, F. Bigl, Phys. Rev. Lett. 2000, 85, 4116.
17. A. Pascale, I. Berbezier, A. Ronda, P. C. Kelires, Phys. Rev. B 2008, 77, 075311.
18. S. Facsko, T. Bobek, A. Stahl, H. Kurz, T. Dekorsy, Phys. Rev. B 2004, 69, 153412.
19. B. Kahng, H. Jeong, A.-L. Barabási, Appl. Phys. Lett. 2001, 78, 805.
20. G. S. Armatas, M. G. Kanatzidis, Science 2006, 313, 817.
21. F. Y. Li, L. Zhang, R. M. Metzger, Chem. Mater. 1998, 10, 2470.
22. J. F. Ziegler, J. P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon, New York 1985.
23. S. Vogel, S. J. Linz, Europhys. Lett. 2006, 75, 884.
24. M. Paniconi, K. R. Elder, Phys. Rev. E 1997, 56, 2713.