SCOPUS 정보 검색 플랫폼

Volumn 48, Issue 4, 2009, Pages

Influence of voltage polarity and electrode configuration on discharge formation in radio-frequency-excited microplasma array

(3) Uchida, Satoshi a Kubota, Takashi a Tochikubo, Fumiyoshi a

a TOKYO METROPOLITAN UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; ARRAY DESIGN; CO-PLANAR ELECTRODES; DISCHARGE CONTROL; ELECTRODE CONFIGURATIONS; ELECTRODE GAP; EXCITED SPECIES; HALF-WAVE; HIGH-DENSITY REGIONS; HIGH-THROUGHPUT; MICROPLASMA ARRAY; NEGATIVE POLARITY; OPERATING PARAMETERS; OPTIMAL CONDITIONS; POSITIVE POLARITY; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; RECTIFIED VOLTAGE; SUSTAINING VOLTAGE; TWO DIMENSIONAL FLUID MODEL; VOLTAGE POLARITY;

ELECTRIC POTENTIAL; ELECTRODES; PLASMA DEVICES; PLASMA DISPLAY DEVICES; PLASMAS; XENON;

ELECTRIC DISCHARGES;

EID: 67849097246 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.48.046001 Document Type: Article

Times cited : (5)

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