Numerical simulation of high-frequency driven dielectric barrier microdischarge with coplanar electrode configuration in Ar

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 A, 2006, Pages 7881-7887

  Otsuka, Shin ^a   Tochikubo, Fumiyoshi ^a   Uchida, Satoshi ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Dielectric barrier microdischarge; High frequency discharge; Microplasma; Numerical simulation

Indexed keywords

ARGON; CARRIER CONCENTRATION; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRODES; IONIZATION; PLASMA DENSITY;

BULK PLASMA; DIELECTRIC BARRIER MICRODISCHARGE; ELECTRON AVALANCHE; FLUID MODEL; MICROPLASMA ARRAY;

DIELECTRIC DEVICES;

EID: 34547859277     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.7881     Document Type: Article

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