Reinforcement of a poly(dimethyl siloxane) mold with high aspect ratio microstructures via a gas-liquid phase sol-gel process

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Jheng, Zih Jian ^a   Fang, Yan Chao ^a   Lo, Kuo Feng ^a   Juang, Yi Je ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GAS LIQUIDS; HIGH ASPECT RATIO MICROSTRUCTURES; HYDROLYSIS AND CONDENSATION; IN-SITU PRECIPITATION; MICROMOLDING; PDMS MOLDS; POLYDIMETHYLSILOXANE PDMS; TETRAETHOXYSILANES;

AGGLOMERATION; ASPECT RATIO; GELATION; GELS; LIQUIDS; MICROCHANNELS; MICROMACHINING; MICROSTRUCTURE; MOLDS; NANOSTRUCTURED MATERIALS; PHOTORESISTS; PRECIPITATION (CHEMICAL); PRESSURE DROP; REINFORCEMENT; SILANES; SILICATES; SILICON OXIDES; SILICONES; SOL-GELS; SOLS; WATER VAPOR;

SOL-GEL PROCESS;

EID: 67849083167     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045016     Document Type: Article

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