Polymerized hexamethyldisilazane coated on equiatomic TiNi shape memory alloy using DC-pulsed plasma assisted chemical vapor deposition

Surface and Coatings Technology

Volumn 202, Issue 12, 2008, Pages 2709-2714

  Chen, Chien Hui ^a   Yang, Mu Rong ^b   Wu, Shyi Kaan ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b TATUNG UNIVERSITY   (Taiwan)

Author keywords

Asymmetric bipolar DC pulsed PACVD; Corrosion resistance improvement; HMDSN; TiNi shape memory alloys

Indexed keywords

BIOCOMPATIBILITY; CORROSION RESISTANCE; DEPOSITION; GAS MIXTURES; MORPHOLOGY; POLYACRYLATES; SILICON CARBIDE; SURFACE ROUGHNESS; THIN FILMS;

ASYMMETRIC BIPOLAR DC-PULSED PACVD; HEXAMETHYLDISILAZANE; ORGANIC-LIKE THIN FILMS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

BIOCOMPATIBILITY; CORROSION RESISTANCE; DEPOSITION; GAS MIXTURES; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYACRYLATES; SILICON CARBIDE; SURFACE ROUGHNESS; THIN FILMS;

EID: 44249112620     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.09.052     Document Type: Article

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