Development of silicon-based microelectrode array

Science in China, Series E: Technological Sciences

Volumn 52, Issue 8, 2009, Pages 2391-2395

  Lin, Jianhui ^a,b   Wu, Xiaoming ^a,b,c   Huang, Pengsheng ^a,b   Feng, Lei ^a   Ren, Tianling ^a,b   Liu, Litian ^a,b  

^a TSINGHUA UNIVERSITY   (China)

^b TSINGHUA NATIONAL LABORATORY FOR INFORMATION SCIENCE AND TECHNOLOGY   (China)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

MEMS; Microelectrode array; Neural engineering

Indexed keywords

ELECTRICAL MEASUREMENT; ELECTRICAL STIMULATIONS; FABRICATION PROCESS; IMPROVED MODELS; MICROELECTRODE ARRAY; MICROELECTRODE IMPEDANCE; MICROELECTROMECHANICAL SYSTEMS; NEURAL ACTIVITY; NEURAL ENGINEERING; SCIATIC NERVES; SIGNAL RECORDING; SILICON-BASED;

CELL MEMBRANES; CIRCUIT SIMULATION; MEMS; MICROELECTROMECHANICAL DEVICES; PHASE INTERFACES; SURFACE DEFECTS;

MICROELECTRODES;

EID: 67650727137     PISSN: 10069321     EISSN: 1862281X     Source Type: Journal    
DOI: 10.1007/s11431-008-0176-8     Document Type: Article

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