Sub-micrometer-sized, cross-type Nb-AlOx-Nb tunnel junctions with low parasitic capacitance

Superconductor Science and Technology

Volumn 22, Issue 6, 2009, Pages

  Anders, S ^a   Schmelz, M ^a   Fritzsch, L ^a   Stolz, R ^a   Zakosarenko, V ^a   Schonau T ^a   Meyer, H G ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZATION; HIGH RESOLUTION; JOSEPHSON TUNNEL JUNCTIONS; LINEAR DIMENSIONS; LOW-PARASITIC; NIOBIUM TECHNOLOGY; PLANARIZING; SELF-ALIGNED; SIDEWALL PASSIVATION; SUB-GAP RESISTANCE; SUBMICROMETER;

CAPACITANCE; MICROMETERS; NIOBIUM; PASSIVATION; SILICON COMPOUNDS; TUNNELS; WIND TUNNELS;

TUNNEL JUNCTIONS;

EID: 67650711462     PISSN: 09532048     EISSN: 13616668     Source Type: Journal    
DOI: 10.1088/0953-2048/22/6/064012     Document Type: Article

References (31)

1. Gurvitch M, Washington M and Huggins H 1983 Appl. Phys. Lett. 42 472
2. Schubert M, Fritzsch L, Wende G and Meyer H-G 2001 IEEE Trans. Appl. Supercond. 11 1066-9
3. Dierichs M M T M, Panhuyzen R A, Honingh C E, de Boer MJ and Klapwijk T M 1993 Appl. Phys. Lett. 62 774
4. Kadin A M, Mancini C A, Feldman M J and Brock D K 2001 IEEE Trans. Appl. Supercond. 11 1050
5. Watanabe M, Nakamura Y and Tsai J-S 2004 Appl. Phys. Lett. 84 410
6. Nakamura Y, Pashkin Yu A and Tsai J S 1999 Nature 398 786
7. Stolz R, Zakosarenko V, Schulz M, Chwala A, Fritzsch L, Meyer H-G and Köstlin E O 2006 The Lead. Edge 25 178
8. Tesche C D and Clarke J 1977 J. Low Temp. Phys. 29 301
9. Drung D 1996 Advanced SQUID read-out electronics SQUIDs: Fundamentals, Fabrication and Applications (NATO ASI Series E: Applied Sciences vol 329) ed H Weinstock (Dordrecht: Kluwer Academic) ppS 63-117
10. Imamura T and Hasuo S 1988 J. Appl. Phys. 64 1586
11. Ketchen M B et al 1991 Appl. Phys. Lett. 59 2609
12. Worsham A H, Prober D E, Kang J H, Przybysz J X and Rooks M J 1991 IEEE Trans. Magn. 27 3165
13. Vdovichev S N, Klimov Yu A, Nozdrin Yu N and Rogov VV 2004 Tech. Phys. Lett. 30 374
14. Harada Y, Haviland D B, Delsing P, Chen C D and Claeson T 1994 Appl. Phys. Lett. 65 636
15. Watanabe M, Nakamura Y and Tsai J S 2004 Appl. Phys. Lett. 84 410
16. Bao Z, Bhushan M, Han S and Lukens J E 1995 IEEE Trans. Appl. Supercond. 5 2731
17. Martinis J M and Ono R H 1990 Appl. Phys. Lett. 57 629
18. Kroger H, Smith L N and Jillie D W 1981 Appl. Phys. Lett. 39 280
19. Dang H and Radparvar M 1991 IEEE Trans. Magn. 27 3157
20. Voss M, Karpov A and Gundlach K H 1993 Supercond. Sci. Technol. 6 373-7
21. Maier D, Rothermel H, Gundlach K H and Zimmerman R 1996 Physica C 268 26
22. Dolata R, Weimann T, Scherer H-J and Niemeyer J 1999 IEEE Trans. Appl. Supercond. 9 3255-8
23. Stan G, Field S B and Martinis J M 2004 Phys. Rev. Lett. 92 097003
24. Mueller F, Poepel R, Kohlmann J, Niemeyer J, Meier W, Weimann T, Grimm L, Duenschede F-W and Gutmann P 1997 IEEE Trans. Instrum. Meas. 46 229
25. Likharev K K 1979 Rev. Mod. Phys. 51 101
26. Dynes R C and Fulton T A 1971 Phys. Rev. B 3 3015
27. www.fluxonics-foundry.de
28. Henkels W H and Kircher J C 1977 IEEE Trans. Magn. MAG-13 63
29. Maezawa M, Aoyagi M, Nakagawa H and Kurosawa I 1995 Appl. Phys. Lett. 66 2134
30. Fiske M D 1964 Rev. Mod. Phys. 36 221
31. Monaco R, Costabile G and Martucciello N 1995 J. Appl. Phys. 77 2073