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Volumn 84, Issue 3, 2004, Pages 410-412
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Circuit with small-capacitance high-quality Nb Josephson junctions
b
NEC CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
FOCUSED-ION-BEAM (FIB) ETCHING;
SINGLE-ELECTRON TRANSISTORS (SET);
ALUMINUM;
CAPACITANCE;
DEGREES OF FREEDOM (MECHANICS);
ELECTRON TUNNELING;
ETCHING;
ION BEAMS;
JOSEPHSON JUNCTION DEVICES;
NANOTECHNOLOGY;
NIOBIUM;
SUPERCONDUCTING TRANSITION TEMPERATURE;
TRANSISTORS;
TUNNEL JUNCTIONS;
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EID: 1242310262
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1640798 Document Type: Article |
Times cited : (22)
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References (13)
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