Adjusting resonant wavelengths and spectral shapes of ring resonators using a cladding sin layer or KOH solution

Optics Express

Volumn 17, Issue 14, 2009, Pages 11884-11891

  Park, Sahnggi ^a   Kim, Kap Joong ^a   Lee, Jong Moo ^a   Kim, In Gyoo ^a   Kim, Gyungock ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

(130.3120) Integrated optics devices; (130.7408) Wavelength filtering devices; (230.7390) waveguides, planar

Indexed keywords

ETCHING; NATURAL FREQUENCIES; NITRIDES; OPTICAL RESONATORS; PHOTOLITHOGRAPHY; RESONATORS; WAVEGUIDES;

(230.7390) WAVEGUIDES, PLANAR; COUPLING COEFFICIENT; E-BEAM LITHOGRAPHY; INTEGRATED OPTICS DEVICES; RESONANCE FREQUENCIES; RESONANT WAVELENGTHS; TRANSMISSION SPECTRUMS; WAVELENGTH FILTERING DEVICES;

WAVEGUIDE FILTERS;

HYDROXIDE; POTASSIUM DERIVATIVE; POTASSIUM HYDROXIDE; SILICON; SILICON DERIVATIVE; SILICON NITRIDE;

ALGORITHM; ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; MATERIALS TESTING; METHODOLOGY; OPTICS; RAMAN SPECTROMETRY; STATISTICAL MODEL; TEMPERATURE; TIME;

ALGORITHMS; EQUIPMENT DESIGN; HYDROXIDES; MATERIALS TESTING; MODELS, STATISTICAL; OPTICS AND PHOTONICS; POTASSIUM COMPOUNDS; SILICON; SILICON COMPOUNDS; SPECTRUM ANALYSIS, RAMAN; TEMPERATURE; TIME FACTORS;

EID: 67650562035     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.011884     Document Type: Article

References (25)

1. H. Rong, S. Xu, Y. H. Kuo, V. Sih, O. Cohen, O. Raday, and M. Paniccia, "Low-threshold continuous-wave Raman silicon laser," Nat. Photonics 1 (4), 232-237 (2007).
2. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435 (7040), 325-327 (2005).
3. J. B. You, M. Park, J. W. Park, and G. Kim, "12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode," Opt. Express 16 (22), 18340-18344 (2008).
4. Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "Cascaded silicon micro-ring modulators for WDM optical interconnection," Opt. Express 14 (20), 9431-9435 (2006).
5. Y. Vlasov, W. M. J. Green, and F. Xia, "High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks," Nat. Photonics 2 (4), 242-246 (2008).
6. T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microringresonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12 (7), 1437-1442 (2004).
7. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "A highly compact third-order silicon microring add-drop filter with a very large free spectral range, a flat passband and a low delay dispersion," Opt. Express 15 (22), 14765-14771 (2007).
8. A. Melloni, "Synthesis of a parallel-coupled ring-resonator filter," Opt. Lett. 26 (12), 917-919 (2001).
9. B. E. Little, S. T. Chu, P. P. Absil, J. V. Hryniewicz, F. G. Johnson, F. Seiferth, D. Gill, V. Van, O. King, and M. Trakalo, "Very High-Order Microring Resonator Filters for WDM applications," IEEE Photon. Technol. Lett. 16 (10), 2263-2265 (2004).
10. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, "Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects," Opt. Express 15 (19), 11934-11941 (2007).
11. J. M. Lee, S. Park, and G. Kim, "Multichannel silicon WDM ring filters fabricated with DUV lithography," Opt. Commun. 281 (17), 4302-4306 (2008).
12. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Multiple- channel silicon micro-resonator based filters for WDM applications," Opt. Express 15 (12), 7489-7498 (2007).
13. F. Xia, L. Sekaric, M. O'Boyle, and Y. Vlasov, "Coupled resonator optical waveguides based on silicon-oninsulator photonic wires," Appl. Phys. Lett. 89 (4), 041122 (2006).
14. J. K. S. Poon, J. Scheuer, Y. Xu, and A. Yariv, "Designing coupled-resonator optical waveguide delay lines," J. Opt. Soc. Am. B 21 (9), 1665-1673 (2004).
15. Q. Li, Z. Zhang, F. Liu, M. Qiu, and Y. Su, "Dense wavelength conversion and multicasting in a resonance-split silicon microring," Appl. Phys. Lett. 93 (8), 081113 (2008).
16. Q. Xu, V. R. Almeida, and M. Lipson, "Micrometer-scale all-optical wavelength converter on silicon," Opt. Lett. 30 (20), 2733-2735 (2005).
17. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29 (24), 2861-2863 (2004).
18. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15 (22), 14467-14475 (2007).
19. M. S. Nawrocka, T. Liu, X. Wang, and R. R. Panepucci, "Tunable silicon microring resonator with wide free spectral range," Appl. Phys. Lett. 89 (7), 071110 (2006).
20. Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-microm radius," Opt. Express 16 (6), 4309-4315 (2008).
21. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, "Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator," Appl. Phys. Lett. 85 (23), 5523 (2004).
22. J. M. Lee, D. J. Kim, G. H. Kim, O. K. Kwon, K. J. Kim, and G. Kim, "Controlling temperature dependence of silicon waveguide using slot structure," Opt. Express 16 (3), 1645-1652 (2008).
23. M. A. Popovic, C. Manolatou, and M. R. Watts, "Coupling-induced resonance frequency shifts in coupled dielectric multi-cavity filters," Opt. Express 14 (3), 1208-1222 (2006).
24. T. Naganawa, H. Haeiwa, and Y. Kokubun, "UV-induced refractive index change of SiN film and its application to center wavelength trimming of vertically coupled microring resonator filter," Jpn. J. Appl. Phys. 43 (No. 8B), 5780-5784 (2004).
25. Technology paper LETI-03, Jan. 5. 2009, http://www.epixfab.eu/uploads/ media/Technology-LETI-03.pdf.