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Applied Physics A: Materials Science and Processing

Volumn 96, Issue 2, 2009, Pages 327-334

The role of diffusion in broadband infrared absorption in chalcogen-doped silicon

(3) Tull, Brian R a Winkler, Mark T a Mazur, Eric a

a HARVARD UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTANCE; BROADBAND ABSORPTION; CHALCOGEN; CHALCOGENS; DIFFUSION LENGTH; DIFFUSION THEORY; DOPANT DIFFUSION; DOPED SILICON; FEMTOSECOND LASER IRRADIATION; GRAIN SIZE; INFRARED LIGHT; INFRARED PHOTODETECTOR; ROLE OF DIFFUSION; SILICON-BASED; SOLUBILITY LIMITS; SULFUR DOPING; SURFACE LAYERS; THERMAL-ANNEALING;

DIFFUSION; DISSOLUTION; DOPING (ADDITIVES); GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; INFRARED ABSORPTION; IRRADIATION; OPTOELECTRONIC DEVICES; PULSED LASER APPLICATIONS; SELENIUM; SULFUR; SURFACE DIFFUSION; TELLURIUM; TELLURIUM COMPOUNDS; ULTRASHORT PULSES;

GAS ABSORPTION;

EID: 67650409977 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-009-5200-8 Document Type: Article

Times cited : (106)

References (42)

1
- 0018294399
- H.R. Vydyanath W.J. Helm J.S. Lorenzo S.T. Hoelke 1979 Infrared Phys. 19 93
- (1979) Infrared Phys. , vol.19 , pp. 93
- Vydyanath, H.R.¹ Helm, W.J.² Lorenzo, J.S.³ Hoelke, S.T.⁴

2
- 0019597833
- N. Sclar 1981 J. Appl. Phys. 52 5207
- (1981) J. Appl. Phys. , vol.52 , pp. 5207
- Sclar, N.¹

3
- 23144463140
- J.E. Carey C.H. Crouch M. Shen E. Mazur 2005 Opt. Lett. 30 1773
- (2005) Opt. Lett. , vol.30 , pp. 1773
- Carey, J.E.¹ Crouch, C.H.² Shen, M.³ Mazur, E.⁴

4
- 36048994628
- Y.A. Astrov, L.M. Portsel, A.N. Lodygin, V.B. Shuman, E.V. Beregulin, in Gettering and Defect Engineering in Semiconductor Technology XI. Solid State Phenomena, vols. 108-109, pp. 401-406 (2005)
- (2005) Gettering and Defect Engineering in Semiconductor Technology XI. Solid State Phenomena , vol.108-109 , pp. 401-406
- Y.A. Astrov¹ L.M. Portsel² A.N. Lodygin³ V.B. Shuman⁴ E.V. Beregulin⁵

5
- 0033322898
- X. Zhang M. Kleverman J. Olajos 1999 Semicond. Sci. Technol. 14 1076
- (1999) Semicond. Sci. Technol. , vol.14 , pp. 1076
- Zhang, X.¹ Kleverman, M.² Olajos, J.³

6
- 0024755466
- A. Henry J. Svensson E. Janzen B. Monemar 1989 Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. 4 261
- (1989) Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. , vol.4 , pp. 261
- Henry, A.¹ Svensson, J.² Janzen, E.³ Monemar, B.⁴

7
- 0000914717
- T.G. Brown D.G. Hall 1986 Appl. Phys. Lett. 49 245
- (1986) Appl. Phys. Lett. , vol.49 , pp. 245
- Brown, T.G.¹ Hall, D.G.²

8
- 36549099596
- T.G. Brown P.L. Bradfield D.G. Hall 1987 Appl. Phys. Lett. 51 1585
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1585
- Brown, T.G.¹ Bradfield, P.L.² Hall, D.G.³

9
- 18444407799
- M.A. Lourenco M. Milosavljevic S. Galata M.S.A. Siddiqui G. Shao R.M. Gwilliam K.P. Homewood 2005 Vacuum 78 551
- (2005) Vacuum , vol.78 , pp. 551
- Lourenco, M.A.¹ Milosavljevic, M.² Galata, S.³ Siddiqui, M.S.A.⁴ Shao, G.⁵ Gwilliam, R.M.⁶ Homewood, K.P.⁷

10
- 67650358403
- J. Bao, M. Tabbal, T. Kim, S. Charnvanichborikarn, J.S. Williams, M.J. Aziz, F. Capasso, Opt. Express 15 (2007)
- (2007) Opt. Express , vol.15
- Bao, J.¹ Tabbal, M.² Kim, T.³ Charnvanichborikarn, S.⁴ Williams, J.S.⁵ Aziz, M.J.⁶ Capasso, F.⁷

11
- 0032351082
- M. Thiagarajan K. Iyakutti E. Palaniyandi 1998 Phys. Status Solidi B-Basic Res. 205 553
- (1998) Phys. Status Solidi B-Basic Res. , vol.205 , pp. 553
- Thiagarajan, M.¹ Iyakutti, K.² Palaniyandi, E.³

12
- 16444365974
- H.G. Grimmeiss E. Janzen H. Ennen O. Schirmer J. Schneider R. Worner C. Holm E. Sirtl P. Wagner 1981 Phys. Rev. B 24 4571
- (1981) Phys. Rev. B , vol.24 , pp. 4571
- Grimmeiss, H.G.¹ Janzen, E.² Ennen, H.³ Schirmer, O.⁴ Schneider, J.⁵ Worner, R.⁶ Holm, C.⁷ Sirtl, E.⁸ Wagner, P.⁹

13
- 0000112820
- E. Janzen R. Stedman G. Grossmann H.G. Grimmeiss 1984 Phys. Rev. B 29 1907
- (1984) Phys. Rev. B , vol.29 , pp. 1907
- Janzen, E.¹ Stedman, R.² Grossmann, G.³ Grimmeiss, H.G.⁴

14
- 0020208994
- E. Janzen H.G. Grimmeiss A. Lodding C. Deline 1982 J. Appl. Phys. 53 7367
- (1982) J. Appl. Phys. , vol.53 , pp. 7367
- Janzen, E.¹ Grimmeiss, H.G.² Lodding, A.³ Deline, C.⁴

15
- 0021422586
- R.G. Wilson 1984 J. Appl. Phys. 55 3490
- (1984) J. Appl. Phys. , vol.55 , pp. 3490
- Wilson, R.G.¹

16
- 0034147441
- A.A. Taskin B.A. Zaitsev V.I. Obodnikov E.G. Tishkovskii 2000 Semiconductors 34 312
- (2000) Semiconductors , vol.34 , pp. 312
- Taskin, A.A.¹ Zaitsev, B.A.² Obodnikov, V.I.³ Tishkovskii, E.G.⁴

17
- 5044230714
- F. Rollert N.A. Stolwijk H. Mehrer 1993 Appl. Phys. Lett. 63 506
- (1993) Appl. Phys. Lett. , vol.63 , pp. 506
- Rollert, F.¹ Stolwijk, N.A.² Mehrer, H.³

18
- 0027557827
- F. Rollert N.A. Stolwijk H. Mehrer 1993 Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. 18 107
- (1993) Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. , vol.18 , pp. 107
- Rollert, F.¹ Stolwijk, N.A.² Mehrer, H.³

19
- 67650349557
- P.L. Gruzin S.V. Zemskii A.D. Bulkin N.M. Makarov 1974 Sov. Phys. Semiconduct. 7 1241
- (1974) Sov. Phys. Semiconduct. , vol.7 , pp. 1241
- Gruzin, P.L.¹ Zemskii, S.V.² Bulkin, A.D.³ Makarov, N.M.⁴

20
- 0003096583
- R.O. Carlson R.N. Hall E.M. Pell 1959 J. Phys. Chem. Solids 8 81
- (1959) J. Phys. Chem. Solids , vol.8 , pp. 81
- Carlson, R.O.¹ Hall, R.N.² Pell, E.M.³

21
- 0017010512
- N.S. Zhdanovich Y.I. Kozlov 1976 Sov. Phys. Semiconduct. 10 1102
- (1976) Sov. Phys. Semiconduct. , vol.10 , pp. 1102
- Zhdanovich, N.S.¹ Kozlov, Y.I.²

22
- 0018105194
- H.R. Vydyanath J.S. Lorenzo F.A. Kroger 1978 J. Appl. Phys. 49 5928
- (1978) J. Appl. Phys. , vol.49 , pp. 5928
- Vydyanath, H.R.¹ Lorenzo, J.S.² Kroger, F.A.³

23
- 0024052928
- H. Stumpel M. Vorderwulbecke J. Mimkes 1988 Appl. Phys. A-Mater. Sci. Process. 46 159
- (1988) Appl. Phys. A-Mater. Sci. Process. , vol.46 , pp. 159
- Stumpel, H.¹ Vorderwulbecke, M.² Mimkes, J.³

24
- 0018431401
- C.S. Kim M. Sakata 1979 Jpn. J. Appl. Phys. 18 247
- (1979) Jpn. J. Appl. Phys. , vol.18 , pp. 247
- Kim, C.S.¹ Sakata, M.²

25
- 0019227214
- H.G. Grimmeiss E. Janzen B. Skarstam A. Lodding 1980 J. Appl. Phys. 51 6238
- (1980) J. Appl. Phys. , vol.51 , pp. 6238
- Grimmeiss, H.G.¹ Janzen, E.² Skarstam, B.³ Lodding, A.⁴

26
- 0018874494
- C.W. White S.R. Wilson B.R. Appleton F.W. Young 1980 J. Appl. Phys. 51 738
- (1980) J. Appl. Phys. , vol.51 , pp. 738
- White, C.W.¹ Wilson, S.R.² Appleton, B.R.³ Young, F.W.⁴

27
- 0020188002
- E.M. Lawson 1982 J. Appl. Phys. 53 6459
- (1982) J. Appl. Phys. , vol.53 , pp. 6459
- Lawson, E.M.¹

28
- 67650365267
- T.G. Kim, J.M. Warrender, M.J. Aziz, Appl. Phys. Lett. 88 (2006)
- (2006) Appl. Phys. Lett. , vol.88
- T.G. Kim¹ J.M. Warrender² M.J. Aziz³

29
- 36749120729
- S.U. Campisano G. Foti P. Baeri M.G. Grimaldi E. Rimini 1980 Appl. Phys. Lett. 37 719
- (1980) Appl. Phys. Lett. , vol.37 , pp. 719
- Campisano, S.U.¹ Foti, G.² Baeri, P.³ Grimaldi, M.G.⁴ Rimini, E.⁵

30
- 0020087906
- M.J. Aziz 1982 J. Appl. Phys. 53 1158
- (1982) J. Appl. Phys. , vol.53 , pp. 1158
- Aziz, M.J.¹

31
- 3342904379
- M.J. Aziz J.Y. Tsao M.O. Thompson P.S. Peercy C.W. White 1986 Phys. Rev. Lett. 56 2489
- (1986) Phys. Rev. Lett. , vol.56 , pp. 2489
- Aziz, M.J.¹ Tsao, J.Y.² Thompson, M.O.³ Peercy, P.S.⁴ White, C.W.⁵

32
- 0034508875
- J.A. Kittl P.G. Sanders M.J. Aziz D.P. Brunco M.O. Thompson 2000 Acta Mater. 48 4797
- (2000) Acta Mater. , vol.48 , pp. 4797
- Kittl, J.A.¹ Sanders, P.G.² Aziz, M.J.³ Brunco, D.P.⁴ Thompson, M.O.⁵

33
- 33846849157
- M.A. Sheehy B.R. Tull C.M. Friend E. Mazur 2006 Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. 137 289
- (2006) Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. , vol.137 , pp. 289
- Sheehy, M.A.¹ Tull, B.R.² Friend, C.M.³ Mazur, E.⁴

34
- 22944436780
- M.A. Sheehy L. Winston J.E. Carey C.M. Friend E. Mazur 2005 Chem. Mater. 17 3582
- (2005) Chem. Mater. , vol.17 , pp. 3582
- Sheehy, M.A.¹ Winston, L.² Carey, J.E.³ Friend, C.M.⁴ Mazur, E.⁵

35
- 5444250536
- C.H. Crouch J.E. Carey M. Shen E. Mazur F.Y. Genin 2004 Appl. Phys. A-Mater. Sci. Process. 79 1635
- (2004) Appl. Phys. A-Mater. Sci. Process. , vol.79 , pp. 1635
- Crouch, C.H.¹ Carey, J.E.² Shen, M.³ Mazur, E.⁴ Genin, F.Y.⁵

36
- 33645312650
- B.R. Tull J.E. Carey M.A. Sheehy C. Friend E. Mazur 2006 Appl. Phys. A-Mater. Sci. Process. 83 341
- (2006) Appl. Phys. A-Mater. Sci. Process. , vol.83 , pp. 341
- Tull, B.R.¹ Carey, J.E.² Sheehy, M.A.³ Friend, C.⁴ Mazur, E.⁵

37
- 67650380278
- Ph.D. Thesis, Harvard University
- J.E. Carey, Ph.D. Thesis, Harvard University (2004)
- (2004)
- J.E. Carey¹

38
- 33748320778
- B.R. Tull J.E. Carey E. Mazur J. McDonald S.M. Yalisove 2006 Mater. Res. Soc. Bull. 31 626
- (2006) Mater. Res. Soc. Bull. , vol.31 , pp. 626
- Tull, B.R.¹ Carey, J.E.² Mazur, E.³ McDonald, J.⁴ Yalisove, S.M.⁵

39
- 0037349742
- R.J. Younkin J.E. Carey E. Mazur J.A. Levinson C.M. Friend 2003 J. Appl. Phys. 93 2626
- (2003) J. Appl. Phys. , vol.93 , pp. 2626
- Younkin, R.J.¹ Carey, J.E.² Mazur, E.³ Levinson, J.A.⁴ Friend, C.M.⁵

40
- 0033891192
- D. von der Linde K. Sokolowski-Tinten 2000 Appl. Surf. Sci. 154 1
- (2000) Appl. Surf. Sci. , vol.154 , pp. 1
- Von Der Linde, D.¹ Sokolowski-Tinten, K.²

41
- 0037837039
- T.E. Glover 2003 J. Opt. Soc. Am. B-Opt. Phys. 20 125
- (2003) J. Opt. Soc. Am. B-Opt. Phys. , vol.20 , pp. 125
- Glover, T.E.¹

42
- 0004020231
- 1 Clarendon Oxford
- J. Crank, The Mathematics of Diffusion, 1st edn. (Clarendon, Oxford, 1956)
- (1956) The Mathematics of Diffusion
- Crank, J.¹

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