Silicon end-effectors for microgripping tasks

Precision Engineering

Volumn 33, Issue 4, 2009, Pages 542-548

  Agnus, Joël ^a   Hériban, David ^a   Gauthier, Michaël ^a   Pétrini, Valérie ^a  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

Author keywords

End effectors; MEMS assembly; Microgripper; Micromanipulation

Indexed keywords

DRIE PROCESS; MEMS ASSEMBLY; MICRO-OBJECTS; MICROGRIPPER; MICROGRIPPING SYSTEMS; MICROMANIPULATION; MICROWORLD; NEW DESIGN; ORIGINAL DESIGN; SERIAL ASSEMBLY;

CANTILEVER BEAMS; GRIPPERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY;

PIEZOELECTRIC ACTUATORS;

EID: 67650407460     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.02.005     Document Type: Article

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