Flexible, lightweight arrays of microcavity plasma devices: Control of cavity geometry in thin substrates

IEEE Transactions on Plasma Science

Volumn 37, Issue 6 PART 1, 2009, Pages 1045-1054

  Readle, Jason D ^a   Tobin, Katelyn E ^a,b   Kim, Kwang Soo ^a   Yoon, Je Kwon ^a   Zheng, Jie ^a   Lee, Seung Keun ^a   Park, Sung Jin ^a   Eden, J Gary ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b CYPRESS SEMICONDUCTOR   (United States)

Author keywords

Atmospheric plasmas; Microplasma arrays; Microplasmas

Indexed keywords

AL FOIL; APERTURE DIAMETER; ATMOSPHERIC PLASMAS; BENT STRUCTURE; CAVITY GEOMETRY; DIELECTRIC BARRIER; DRIVING FREQUENCIES; FLEXIBLE ARRAYS; IGNITION VOLTAGE; MATERIALS SYSTEMS; MICROCAVITY PLASMA DEVICES; MICROPLASMA ARRAY; MICROPLASMA ARRAYS; MICROPLASMAS; NANOPOROUS ALUMINA; PLASTIC SUBSTRATES; REPLICA MOLDING; SINUSOIDAL VOLTAGE WAVEFORM; STEADY STATE; THIN SUBSTRATE; TOTAL PRESSURE; ULTRAVIOLET CURABLE; VOLTAGE-CURRENT CHARACTERISTICS; WET CHEMICAL PROCESS; WET CHEMICAL PROCESSING;

ALUMINA; ALUMINUM; ALUMINUM FOIL; ATMOSPHERIC CHEMISTRY; CHEMICAL INDUSTRY; ELECTRIC POTENTIAL; LIGHTING; MICROCAVITIES; MOLDING; NEON; PLASMA DEVICES; PLASMA DISPLAY DEVICES; PLASMAS; XENON;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 67650318485     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2020087     Document Type: Article

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