Generation of spurious x-rays by focused ion beams in dual beam instruments

Microscopy and Microanalysis

Volumn 12, Issue SUPPL. 2, 2006, Pages 1250-1251

  Evertsen, J J ^a   Toth, M ^b   Thiel, B L ^a   Lifshin, E ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750876274     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606068000     Document Type: Conference Paper

References (4)

1. L.A. Giannuzzi, Scanning, Vol. 27, (2005) 165.
2. G.M. McCracken, Rep. Prog. Phys. 38 (1975) 241.
3. J.I. Goldstein et al., Scanning Electron Microscopy and X-ray Microanalysis, Plenum, New York, 1992.
4. Thanks to Vasiliki Tileli for help with QuickField™ and to the Interconnect Focus Center for partial funding of this work.