A direct-write microfluidic fabrication process for CMOS-based Lab-on-Chip applications

Microelectronic Engineering

Volumn 86, Issue 10, 2009, Pages 2104-2109

  Ghafar Zadeh, Ebrahim ^a   Sawan, Mohamad ^b   Therriault, Daniel ^b   Rajagopalan, Sumitra ^b   Chodavarapu, Vamsy P ^a  

^a MCGILL UNIVERSITY   (Canada)

^b ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Capacitive sensor; CMOS; Direct write microfluidic fabrication process (DWFP); Hydrogel based microvalve; Microfluidic channel

Indexed keywords

CAPACITIVE SENSOR; CMOS; CMOS CHIPS; DIRECT WRITE; DIRECT-WRITE MICROFLUIDIC FABRICATION PROCESS (DWFP); FABRICATION PROCESS; LAB-ON-CHIP; LOW-TEMPERATURE PROCESS; MICRO VALVES; MICROFLUIDIC CHANNEL; MICROFLUIDIC COMPONENTS; MICROFLUIDIC PACKAGING;

CHIP SCALE PACKAGES; FABRICATION; FLUIDIC LOGIC DEVICES; HYDROGELS; PUMPS; SENSORS; VALVES (MECHANICAL);

MICROFLUIDICS;

EID: 67650169381     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.02.011     Document Type: Article

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