Influence of step edge diffusion on surface morphology during epitaxy

Surface Science

Volumn 539, Issue 1-3, 2003, Pages 91-98

  Murty, M V Ramana ^a,b   Cooper, B H ^a  

^a Cornell University   (United States)

^b E2O Communications Inc   (United States)

Author keywords

Epitaxy; Monte Carlo simulations; Surface diffusion

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; EPITAXIAL GROWTH; MONTE CARLO METHODS; MORPHOLOGY; NUCLEATION; THICK FILMS;

STEP EDGE DIFFUSION;

SURFACE ROUGHNESS;

EID: 0043166369     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(03)00749-0     Document Type: Article

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