Sensing gap reconfigurable capacitive type MEMS accelerometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6800, Issue , 2008, Pages

  Je, Chang Han ^a   Lee, Myunglae ^a   Jung, Sunghye ^a   Lee, Sungsik ^a   Hwang, Gunn ^a   Choi, Changauck ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Acceleration; Accelerometer; Capacitive; MEMS; Microelectromechanical system

Indexed keywords

ELECTROSTATIC ACTUATORS; MEMS; OPTICAL RESOLVING POWER; REACTIVE ION ETCHING; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY;

COMB STRUCTURE; MEMS ACCELEROMETER; REFERENCE COMB ELECTRODE;

ACCELEROMETERS;

EID: 41149086379     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.759392     Document Type: Conference Paper

References (4)

1. Babak Vakili Amini, et al. "A high resolution, stictionless, CMOS compatible SOI Accelerometer with a low noise, low power, 0.25um CMOS interface," MEMS '04, 2004, pp. 572-575.
2. T. Yamamoto, et al. "Capacitive accelerometer with high aspect ratio single crystalline silicon microstructure using the SOI structure with polysilicon-based interconnect technique, " MEMS '00, 2000, pp. 514-519.
3. Pejman Monajemi and Farrokh Ayazi, "Design Optimization and Implementation of a Microgravity Capacitive HARSS Accelerometer, " IEEE Sensors Journal, Vol.6, No.1, 2006, pp. 39-46.
4. Junseok Chae and Khalil Najafi, "A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer," Journal of Microelectromechanical system, Vol.14, No.2, 2005, pp. 235-242.