Designing manufacturable MEMS in CMOS compatible processes - Methodology and case studies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5455, Issue , 2004, Pages 116-127

  Schröpfer, Gerold ^a   McNie, Mark ^b   Da Silva, Mark ^a   Davies, Rhodri ^b   Rickard, Alexandra ^b   Musalem, François Xavier ^a  

^a European Headquarter and Development Center   (United States)

^b QINETIQ   (United Kingdom)

Author keywords

CAD; CMOS compatible; Design for Manufacturing; EDA; MEMS; Micromachining; Process Design Kits

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; COSTS; FABRICATION; MICROMACHINING; PERFORMANCE; PROBABILITY; PRODUCT DESIGN;

CMOS-COMPATIBLE; DESIGN FOR MANUFACTURING (DFM); ELECTRONIC DESIGN AUTOMATION (EDA); PROCESS DESIGN KITS;

MICROELECTROMECHANICAL DEVICES;

EID: 8844239321     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.544971     Document Type: Conference Paper

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