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Volumn 2000-January, Issue , 2000, Pages 55-58
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Measurements of piezoelectric coefficients of nitride semiconductor films
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Author keywords
Electrostriction; Gallium nitride; Optical interferometry; Optical materials; Phase measurement; Piezoelectric films; Piezoelectric materials; Semiconductivity; Semiconductor materials; Strain measurement
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Indexed keywords
ALUMINUM NITRIDE;
ELECTROSTRICTION;
GALLIUM NITRIDE;
INSULATING MATERIALS;
INTERFEROMETRY;
NITRIDES;
OPTICAL MATERIALS;
PHASE MEASUREMENT;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRICITY;
SEMICONDUCTOR MATERIALS;
SHEAR STRAIN;
SINGLE CRYSTALS;
STRAIN MEASUREMENT;
ZINC SULFIDE;
ELECTROMECHANICAL RESPONSE;
ELECTROSTRICTIVE COEFFICIENTS;
OPTICAL INTERFEROMETRY;
PIEZOELECTRIC COEFFICIENT;
PIEZOELECTRIC FILM;
PIEZOELECTRIC MEASUREMENTS;
SEMICONDUCTIVITY;
SINGLE-CRYSTAL MATERIALS;
FILMS;
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EID: 67649650532
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SIM.2000.939197 Document Type: Conference Paper |
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Times cited : (7)
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References (8)
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