Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array

International Journal of Surface Science and Engineering

Volumn 3, Issue 3, 2009, Pages 227-241

  Young, Jin ^a   Arai, Yoshikazu ^a   Gao, Wei ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Diamond turning machine; Fast tool control unit; In process measurement; Micro lens array; Piezoelectric force sensor

Indexed keywords

COPPER; MICROLENSES; OXYGEN; OXYGEN CUTTING; PIEZOELECTRICITY; PROCESS CONTROL; TURNING;

DIAMOND TURNING MACHINES; FAST TOOL CONTROLS; IN-PROCESS MEASUREMENT; MICRO-LENS ARRAYS; PIEZOELECTRIC FORCE SENSORS;

DIAMOND CUTTING TOOLS;

EID: 67649631568     PISSN: 1749785X     EISSN: 17497868     Source Type: Journal    
DOI: 10.1504/IJSURFSE.2009.026611     Document Type: Article

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