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Volumn 4, Issue 6, 2009, Pages 491-497
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Low temperature growth of In 2O 3 and InN nanocrystals on Si(111) via chemical vapour deposition based on the sublimation of NH 4Cl in In
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Author keywords
Chemical vapour deposition; Indium nitride; Indium oxide; Low temperature; Nanocrystals
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Indexed keywords
AMMONIUM CHLORIDE;
AVERAGE DIAMETER;
CHEMICAL VAPOUR DEPOSITION;
DIRECT OXIDATION;
GAS FLOWS;
GAS STREAMS;
HIGH TEMPERATURE;
HIGH YIELD;
INDIUM NITRIDE;
INDIUM OXIDE;
LOW TEMPERATURE;
LOW TEMPERATURE GROWTH;
NANOPYRAMIDS;
SI (1 1 1);
AERODYNAMICS;
AMMONIUM COMPOUNDS;
ATMOSPHERIC PRESSURE;
CHEMICAL VAPOR DEPOSITION;
CHLORINE COMPOUNDS;
FLOW OF GASES;
GASES;
NANOCRYSTALS;
NITRIDES;
OXIDATION;
SILICON;
SUBLIMATION;
INDIUM;
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EID: 67649532664
PISSN: 19317573
EISSN: 1556276X
Source Type: Journal
DOI: 10.1007/s11671-009-9266-1 Document Type: Article |
Times cited : (11)
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References (36)
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