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Volumn 86, Issue 4-6, 2009, Pages 535-538

Surface charging suppression using PEDOT/PSS in the fabrication of three dimensional structures on a quartz substrate

Author keywords

PEDOT PSS; Quartz substrate; Surface charging; Three dimensional patterning

Indexed keywords

CONDUCTIVE POLYMERS; ELECTRON-BEAM LITHOGRAPHIES; GEOMETRICAL SHAPES; INSULATING SUBSTRATES; NEGATIVE TONE PHOTORESISTS; PEDOT/PSS; POLY(STYRENESULFONATE); QUARTZ SUBSTRATE; REACTIVE-ION ETCHINGS; SINGLE STEPS; SUBSTRATE SELECTIVITIES; SURFACE CHARGING; THREE-DIMENSIONAL (3D); THREE-DIMENSIONAL STRUCTURES; TOP COATINGS; WATER SOLUBLE;

EID: 67349278527     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.075     Document Type: Article
Times cited : (17)

References (7)
  • 7
    • 0028498898 scopus 로고
    • Huang W.-S. Polymer 35 (1994) 4057-4064
    • (1994) Polymer , vol.35 , pp. 4057-4064
    • Huang, W.-S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.