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Volumn 86, Issue 4-6, 2009, Pages 535-538
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Surface charging suppression using PEDOT/PSS in the fabrication of three dimensional structures on a quartz substrate
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Author keywords
PEDOT PSS; Quartz substrate; Surface charging; Three dimensional patterning
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Indexed keywords
CONDUCTIVE POLYMERS;
ELECTRON-BEAM LITHOGRAPHIES;
GEOMETRICAL SHAPES;
INSULATING SUBSTRATES;
NEGATIVE TONE PHOTORESISTS;
PEDOT/PSS;
POLY(STYRENESULFONATE);
QUARTZ SUBSTRATE;
REACTIVE-ION ETCHINGS;
SINGLE STEPS;
SUBSTRATE SELECTIVITIES;
SURFACE CHARGING;
THREE-DIMENSIONAL (3D);
THREE-DIMENSIONAL STRUCTURES;
TOP COATINGS;
WATER SOLUBLE;
BUILDING MATERIALS;
CONDUCTING POLYMERS;
ELECTRON BEAM LITHOGRAPHY;
ELECTRON BEAMS;
OXIDE MINERALS;
PHOTORESISTS;
QUARTZ;
REACTIVE ION ETCHING;
SULFUR COMPOUNDS;
SURFACE CHARGE;
SURFACES;
THREE DIMENSIONAL;
SUBSTRATES;
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EID: 67349278527
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2008.11.075 Document Type: Article |
Times cited : (17)
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References (7)
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