Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model

Applied Surface Science

Volumn 255, Issue 16, 2009, Pages 7203-7211

  D'Elia, Stefano ^a   Scaramuzza, Nicola ^a   Ciuchi, Federica ^a   Versace, Carlo ^a   Strangi, Giuseppe ^a   Bartolino , Roberto ^a  

^a CEMIFCAL   (Italy)

Author keywords

Ellipsometry investigation; Indium tin oxide thin films; Optical properties; Thermal annealing

Indexed keywords

ANNEALING; DENSITY (OPTICAL); DENSITY MEASUREMENT (OPTICAL); ENERGY GAP; INDIUM COMPOUNDS; ITO GLASS; OPTICAL PROPERTIES; OXYGEN VACANCIES; SPECTROPHOTOMETRY; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; TIN OXIDES; X RAYS;

ELECTRONIC AND OPTICAL PROPERTIES; EXTINCTION COEFFICIENTS; FLOAT GLASS SUBSTRATES; INDIUM TIN OXIDE THIN FILMS; OPTICAL BAND GAP ENERGY; STRUCTURAL AND OPTICAL PROPERTIES; THERMAL-ANNEALING; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

OPTICAL FILMS;

EID: 67349271673     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.03.064     Document Type: Article

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